Novel thin-film deposition method and system with IR-FEL
2001 ◽
Vol 475
(1-3)
◽
pp. 640-644
◽
1996 ◽
Vol 62
(599)
◽
pp. 2711-2716
Keyword(s):
Keyword(s):
2018 ◽
Vol 30
(10)
◽
pp. 3538-3544
◽
2018 ◽
Vol 65
(6)
◽
pp. 2517-2524
◽
2017 ◽
Vol 247
◽
pp. 197-215
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