Characterization of reactive ion etching of sol-gel SiO 2 using Taguchi optimization method
Keyword(s):
Sol Gel
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2011 ◽
Vol 89
(11)
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pp. 2389-2395
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Keyword(s):
2015 ◽
Vol 10
(1)
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pp. 95-103
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2020 ◽
Vol 236
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pp. 117547
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1995 ◽
Vol 29
(1-3)
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pp. 176-180
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2000 ◽
Vol 29
(6)
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pp. 837-840
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2015 ◽
Vol 57
(39)
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pp. 18379-18390
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