High-resolution x-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micrmachining
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2002 ◽
Vol 14
(29)
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pp. 7035-7043
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2013 ◽
Vol 93
(9)
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pp. 1054-1064
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1996 ◽
Vol 65
(3)
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pp. 661-663
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2008 ◽
Vol 64
(a1)
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pp. C592-C592
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1993 ◽
Vol 49
(s1)
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pp. c366-c366
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