High-aspect-ratio two-dimensional silicon subwavelength gratings fabricated by fast atom beam etching
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2001 ◽
Vol 169-170
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pp. 603-606
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2012 ◽
Vol 94-95
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pp. 70-82
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1990 ◽
Vol 8
(3)
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pp. 574
2001 ◽
Vol IV.01.1
(0)
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pp. 281-282
2003 ◽
Vol 39
(2)
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pp. 343-349
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