Ion beam sputter deposition of TiNi shape memory alloy thin films

1999 ◽  
Author(s):  
Sam T. Davies ◽  
Kazuyoshi Tsuchiya
Keyword(s):  
Thin Films ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition

Ion beam sputter deposition of layered magnetic thin films

1983 ◽  
Vol 35 (1-3) ◽  
pp. 89-92 ◽  
Author(s):  
J.W. Smits ◽  
H.A. Algra ◽  
U. Enz ◽  
R.P. van Stapele
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Magnetic Thin Films ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition

Processing-structure relations for ferroelectric thin films deposited by ion beam sputter deposition

1991 ◽  
Vol 116 (1) ◽  
pp. 35-49 ◽  
Author(s):  
Angus Kingon ◽  
Michael Ameen ◽  
Orlando Auciello ◽  
Kenneth Gifford ◽  
Husam Al-Shareef ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Ferroelectric Thin Films ◽  
Ion Beam Sputter Deposition

Growth of single-phase nanostructured Er2O3 thin films on Si (100) by ion beam sputter deposition

2015 ◽  
Vol 283 ◽  
pp. 241-246 ◽  
Author(s):  
Wei Mao ◽  
Masaya Fujita ◽  
Takumi Chikada ◽  
Kenji Yamaguchi ◽  
Akihiro Suzuki ◽  
...  
Keyword(s):  
Thin Films ◽  
Single Phase ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition

Characterization of nanocrystalline indium tin oxide thin films prepared by ion beam sputter deposition method

2010 ◽  
Vol 518 (23) ◽  
pp. 6891-6896 ◽  
Author(s):  
S. Venkatachalam ◽  
Hiroshi Nanjo ◽  
Fathy M.B. Hassan ◽  
Kazunori Kawasaki ◽  
Mitsuhiro Kanakubo ◽  
...  
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Deposition Method ◽  
Oxide Thin Films ◽  
Ion Beam Sputter Deposition

X-ray photoelectron and X-ray absorption spectroscopic study on β-FeSi2 thin films fabricated by ion beam sputter deposition

2010 ◽  
Vol 256 (10) ◽  
pp. 3155-3159 ◽  
Author(s):  
F. Esaka ◽  
H. Yamamoto ◽  
N. Matsubayashi ◽  
Y. Yamada ◽  
M. Sasase ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Study ◽  
Ion Beam ◽  
Sputter Deposition ◽  
X Ray ◽  
X Ray Absorption ◽  
Ion Beam Sputter Deposition

Electrical resistivity of RuOx thin films prepared by ion beam sputter deposition

1993 ◽  
Vol 65-66 ◽  
pp. 293-297 ◽  
Author(s):  
H. Kezuka ◽  
R. Egerton ◽  
M. Masui ◽  
T. Wada ◽  
T. Ikehata ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Resistivity ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition

Variation of the deposition rate during ion beam sputter deposition of optical thin films

2005 ◽  
Vol 484 (1-2) ◽  
pp. 170-173 ◽  
Author(s):  
Hongxiang Liu ◽  
Shengming Xiong ◽  
Linghui Li ◽  
Yundong Zhang
Keyword(s):  
Thin Films ◽  
Deposition Rate ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Ion Beam Sputter Deposition
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