Development of a 0.1 μm linewidth fabrication process for x-ray lithography with a laser plasma source

1999 ◽  
Author(s):  
Romuald Bobkowski ◽  
Robert Fedosejevs ◽  
James N. Broughton
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Fabrication Process ◽  
X Ray

Laser plasma source for soft x-ray imaging in CIOM

1997 ◽  
Author(s):  
Zhongxing Shao ◽  
Zhanshan Wang ◽  
Fengming Xu ◽  
Junxia Lu ◽  
Xingdan Chen
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
X Ray Imaging

Calibration Of A KrF Laser-Plasma Source For X-Ray Microscopy Applications

1988 ◽  
Author(s):  
I C. E. Turcu ◽  
F O'Neill ◽  
U Zammit ◽  
Y Al-Hadithi ◽  
R W. Eason ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
Krf Laser

Improved liquid jet laser-plasma source for X-ray microscopy

2003 ◽  
Vol 104 ◽  
pp. 121-122
Author(s):  
J. de Groot ◽  
G. A. Johansson ◽  
O. Hemberg ◽  
H. M. Hertz
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Jet ◽  
X Ray

scholarly journals Quantitative phase contrast imaging of a shock-wave with a laser-plasma based X-ray source

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
F. Barbato ◽  
S. Atzeni ◽  
D. Batani ◽  
D. Bleiner ◽  
G. Boutoux ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Phase Contrast ◽  
Plastic Material ◽  
Plasma Source ◽  
Phase Contrast Imaging ◽  
Small Scale ◽  
Contrast Imaging ◽  
X Ray ◽  
Clear Identification ◽  
X Ray Absorption

AbstractX-ray phase contrast imaging (XPCI) is more sensitive to density variations than X-ray absorption radiography, which is a crucial advantage when imaging weakly-absorbing, low-Z materials, or steep density gradients in matter under extreme conditions. Here, we describe the application of a polychromatic X-ray laser-plasma source (duration ~0.5 ps, photon energy >1 keV) to the study of a laser-driven shock travelling in plastic material. The XPCI technique allows for a clear identification of the shock front as well as of small-scale features present during the interaction. Quantitative analysis of the compressed object is achieved using a density map reconstructed from the experimental data.

X‐ray contact microscopy using an excimer laser plasma source with different target materials and laser pulse durations

1997 ◽  
Vol 187 (2) ◽  
pp. 96-103 ◽  
Author(s):  
P. ALBERTANO ◽  
L. REALE ◽  
L. PALLADINO ◽  
A. REALE ◽  
R. COTTON ◽  
...  
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
Laser Plasma ◽  
Plasma Source ◽  
X Ray

Qualitative detection of Mg content in a leaf ofHedera helix by using X-ray radiation from a laser plasma source

2008 ◽  
Vol 71 (6) ◽  
pp. 459-468 ◽  
Author(s):  
Lucia Reale ◽  
Antonia Lai ◽  
Maria Sighicelli ◽  
Anatoly Faenov ◽  
Tatiana Pikuz ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
Qualitative Detection ◽  
Mg Content

Study of a soft x-ray (1-5 nm) laser plasma source for femtosecond time resolved XAS

2005 ◽  
Author(s):  
S. Fourmaux ◽  
L. Lecherbourg ◽  
J. C. Kieffer ◽  
F. Martin ◽  
H. Pépin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Time Resolved ◽  
X Ray
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