Supersparse overlay sampling plans: an evaluation of methods and algorithms for optimizing overlay quality control and metrology tool throughput

Author(s):  
Joseph C. Pellegrini ◽  
Ziad R. Hatab ◽  
Jeffrey M. Bush ◽  
Thomas R. Glass
2000 ◽  
pp. 233-244

Abstract This chapter provides an introduction to statistical process control and the concept of total quality management. It begins with a review of quality improvement efforts in the extrusion industry and the considerations involved in developing sampling plans and interpreting control charts. It then lays out the steps that would be followed in order to implement statistical testing for billet casting, die performance, or any other process or variable that impacts extrusion quality. The chapter concludes with an overview of the fundamentals of total quality management.


1976 ◽  
Vol 20 (1) ◽  
pp. 1-5 ◽  
Author(s):  
C. G. Drury

Recent progress in the Statistical Quality Control field has led to the design of Sampling plans which do not assume perfect inspection. Simple methods now exist for analyzing the effect of inspector error on the operating characteristic (OC) curve of a plan and further for re-designing the plan so that a predetermined OC curve is obtained. However, the usual assumption made about human inspection error is that it is constant. Many studies show that Type 1 and Type 2 inspector error change systematically with many variables such as input quality, complexity of item inspected, type of fault, standards, individual differences, etc. This paper develops a methodology for including an explicit human inspector model into the sampling plan design. A particular model integrating visual search and decision making (proposed earlier by the author) is used to demonstrate the feasibility of including explicit human inspector data in the design process. The applications of this model to single and double sampling plans are discussed, together with evidence for the validity of the model under laboratory and field conditions.


1983 ◽  
Vol R-32 (4) ◽  
pp. 359-365 ◽  
Author(s):  
L.F. Pau ◽  
C. Toghrai ◽  
C.H. Chen

Sign in / Sign up

Export Citation Format

Share Document