Hollow fiber delivery of ArF and KrF excimer laser light

1999 ◽  
Author(s):  
Yuji Matsuura ◽  
Mitsunobu Miyagi
Keyword(s):  
Excimer Laser ◽  
Hollow Fiber ◽  
Laser Light ◽  
Krf Excimer Laser

Photochemical Pattern Etching of Single-Crystalline 3C-SiC

1997 ◽  
Vol 495 ◽  
Author(s):  
T. Mori ◽  
K. Hatao ◽  
M. Murahara
Keyword(s):  
Excimer Laser ◽  
Surface Reaction ◽  
Laser Light ◽  
Sample Surface ◽  
Etch Depth ◽  
Reaction Cell ◽  
Single Crystalline ◽  
Excimer Lamp ◽  
Krf Laser ◽  
Krf Excimer Laser

ABSTRACTA single-crystalline 3C-SiC is very difficult to etch compared with a polycrystalline SiC. Thus, a photochemical pattern etching of the SiC was demonstrated by using Xe2* excimer lamp and ArF or KrF excimer laser. To promote the surface reaction, a Xe2* excimer lamp was employed to produce many radicals on the sample surface; simultaneously, ArF or KrF laser light irradiated the surface via a circuit pattern to dissociate the Si-C bonds. The Si and C reacted with the F and N radicals photo-dissociated from NF3 gas to form SiF4, CFn and CN, which diffused in the reaction cell. As a result, the single-crystalline 3C-SiC was photo-chemically etched effectively. With the NF3 gas of 200Torr, the Xe2* excimer lamp of 7mW/cm2, and the KrF excimer laser of 650mJ/cm2, 20Hz and 10,000shots, the etch depth of 700 Å was successfully achieved.

Beam homogenizer for hollow-fiber delivery system of excimer laser light

2003 ◽  
Vol 42 (18) ◽  
pp. 3505 ◽  
Author(s):  
Yuji Matsuura ◽  
Daisuke Akiyama ◽  
Mitsunobu Miyagi
Keyword(s):  
Excimer Laser ◽  
Delivery System ◽  
Hollow Fiber ◽  
Laser Light ◽  
Beam Homogenizer

0.13 µmPattern Delineation Using KrF Excimer Laser Light

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6816-6822 ◽  
Author(s):  
Akira Imai ◽  
Naoko Asai ◽  
Takumi Ueno ◽  
Norio Hasegawa ◽  
Toshihiko Tanaka ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Light ◽  
Krf Excimer Laser

Hollow fiber delivery of F2-excimer laser light

2001 ◽  
Author(s):  
Yuji Matsuura ◽  
Takashi Yamamoto ◽  
Mitsunobu Miyagi
Keyword(s):  
Excimer Laser ◽  
Hollow Fiber ◽  
Laser Light

Krf Excimer Laser Induced Photochemical Modification of Polyphenylenesulfide Surface Into Hydrophilic Property

1993 ◽  
Vol 334 ◽  
Author(s):  
H. Kashiura ◽  
M. Okoshi ◽  
M. Murahara
Keyword(s):  
Formic Acid ◽  
Excimer Laser ◽  
Laser Light ◽  
Carboxyl Groups ◽  
Hydrogen Atoms ◽  
Acid Vapor ◽  
Dehydrogenation Reaction ◽  
Hydrophilic Property ◽  
Krf Excimer Laser ◽  
Photochemical Modification

AbstractCarboxyl groups were photochemically substituted for hydrogen atoms at a polyphenylenesulfide surface by using an KrF excimer laser light and vaporized formic acid. In the process, the polyphenylenesulfide film was placed in the formic acid vapor, and the surface was irradiated with the KrF excimer laser light. Irradiating with the laser, the surface was dehydrogenated by the hydrogen atoms which were photodissociated from the formic acid; the dangling bonds on the surface combined with the COOH radicals which were also photodissociated. The hydrophilic property of the photomodified surface was evaluated by the measurement of the contact angle with water. The dehydrogenation reaction and the substitution reaction of the COOH radicals were inspected by XPS analysis. Surface morphology of the sample was observed by SEM photograph.

Inactivation of Bacillus subtilis Spores on Aluminum and Polyethylene Preformed Cartons by UV-Excimer Laser Irradiation

2000 ◽  
Vol 63 (6) ◽  
pp. 753-757 ◽  
Author(s):  
K. WARRINER ◽  
G. RYSSTAD ◽  
A. MURDEN ◽  
P. RUMSBY ◽  
D. THOMAS ◽  
...  
Keyword(s):  
Bacillus Subtilis ◽  
Laser Beam ◽  
Excimer Laser ◽  
Laser Light ◽  
Excimer Lasers ◽  
Uv Laser ◽  
Irradiation Treatment ◽  
Excimer Laser Irradiation ◽  
Krf Excimer Laser ◽  
Optimized Conditions

The efficacy of UV KrF-excimer laser light (at 248 nm) to inactivate Bacillus subtilis spores loaded onto preformed cartons was found to be dependent on the interior carton coating and scheme by which the irradiation was applied. When the carton was held static during UV laser treatment, the majority of the dose was delivered to the base of the carton and to a lesser extent to the upper part of the pack. In this arrangement no irradiation of the interior sides of the carton was observed. A more even distribution of dose was achieved, however, by moving the carton within the laser beam during irradiation treatment. The distribution of UV was also found to be dependent on the type of carton interior coating. With aluminum cartons the dose measured was found to be significantly greater (P < 0.01) and more evenly distributed across the interior compared to when polyethylene packs were tested. Under optimized conditions no spore survivors were detected on aluminum cartons preloaded with 9.5 × 105 B. subtilis spores by applying a UV laser output dose of 160 J. In comparison, the same conditions only achieved a significantly lower (P < 0.01) reduction in spore numbers (log count reduction 4.2) when polyethylene cartons were used. This difference in lethality and UV distribution of laser light was associated with the higher internal reflection of photons with aluminum cartons. The suitability of UV-excimer lasers for sterilizing preformed cartons over traditional germicidal lamp-based methods is discussed.

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara
Keyword(s):  
Thin Film ◽  
Boron Carbide ◽  
Excimer Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Krf Excimer Laser
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