ArF radiation resistance of optical coatings on CaF 2 in relation to the surface finish of the substrate
1989 ◽
Vol 47
◽
pp. 372-373
Keyword(s):
2011 ◽
Vol 2
(3)
◽
pp. 68-70
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2012 ◽
Vol 22
(3)
◽
pp. 219-232
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