Computational model of short-pulse laser target interactions

1998 ◽  
Author(s):  
Jiri Limpouch ◽  
Alexander A. Andreev ◽  
Ladislav Drska
Keyword(s):  
Computational Model ◽  
Pulse Laser ◽  
Short Pulse ◽  
Laser Target ◽  
Short Pulse Laser

Designing and building an integrated target chamber system for high intensity short-pulse laser-target interaction experiments

2003 ◽  
Vol 74 (3) ◽  
pp. 1819-1823
Author(s):  
Kazuhito Yasuike ◽  
Satoshi Orimo ◽  
Mamiko Nishiuchi ◽  
Masayuki Suzuki ◽  
Kouji Matsukado ◽  
...  
Keyword(s):  
Pulse Laser ◽  
High Intensity ◽  
Short Pulse ◽  
Target Chamber ◽  
Chamber System ◽  
Laser Target ◽  
Target Interaction ◽  
Short Pulse Laser

Silicon Thinning using Ultra-Short Pulse Laser Ablation

2004 ◽  
Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Sample Preparation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Special Care ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.

Chromium oxide dissolution in steels via short pulse laser processing

2013 ◽  
Vol 115 (4) ◽  
pp. 1469-1477 ◽  
Author(s):  
Evgeny Kharanzhevskiy ◽  
Sergey Reshetnikov
Keyword(s):  
Pulse Laser ◽  
Chromium Oxide ◽  
Laser Processing ◽  
Short Pulse ◽  
Oxide Dissolution ◽  
Short Pulse Laser
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