Characteristics of excitation discharge of an excimer laser in gas density depletion

Author(s):  
Go Imada ◽  
Wataru Masuda ◽  
Kiyoshi Yatsui
1997 ◽  
Author(s):  
Go Imada ◽  
Yasuo Sato ◽  
Hiroyuki Yoshida ◽  
Wataru Masuda ◽  
Kiyoshi Yatsui

2000 ◽  
Vol 88 (8) ◽  
pp. 4531 ◽  
Author(s):  
Go Imada ◽  
Kiyoshi Yatsui ◽  
Wataru Masuda

1991 ◽  
Vol 111 (4) ◽  
pp. 283-290
Author(s):  
Shigeyuki Takagi ◽  
Koji Kakizaki ◽  
Tatsumi Goto ◽  
Chobei Yamabe ◽  
Kenji Horii

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