Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology
1976 ◽
Vol 34
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pp. 592-593
2005 ◽
Vol 47
(3)
◽
pp. 172-177
2020 ◽
1999 ◽
Vol 10
(6)
◽
pp. 489-492
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