Design and fabrication of 256x256 diffractive microlens arrays on Si substrates

1998 ◽  
Author(s):  
Yi Li ◽  
Xinjian Yi ◽  
Jianhua Hao
Keyword(s):  
Microlens Arrays ◽  
Si Substrates ◽  
Diffractive Microlens

scholarly journals Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays

2015 ◽  
Vol 23 (26) ◽  
pp. 33777 ◽  
Author(s):  
Giuseppe Intermite ◽  
Aongus McCarthy ◽  
Ryan E. Warburton ◽  
Ximing Ren ◽  
Federica Villa ◽  
...  
Keyword(s):  
Fill Factor ◽  
Single Photon ◽  
Microlens Arrays ◽  
Detector Arrays ◽  
Avalanche Diode ◽  
Diode Detector ◽  
Diffractive Microlens

Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing

2008 ◽  
Vol 47 (10) ◽  
pp. 1430 ◽  
Author(s):  
Jiubin Tan ◽  
Mingguang Shan ◽  
Chenguang Zhao ◽  
Jian Liu
Keyword(s):  
Direct Writing ◽  
Laser Direct Writing ◽  
Microlens Arrays ◽  
Diffractive Microlens

Novel method of fabrication of diffractive microlens arrays

2003 ◽  
Author(s):  
Sihai Chen ◽  
Xinjian Yi ◽  
Hong Ma ◽  
Guang Huang ◽  
Hongchen Wang ◽  
...  
Keyword(s):  
Microlens Arrays ◽  
Novel Method ◽  
Diffractive Microlens
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