Design and fabrication of 128x128 diffractive microlens arrays on Si for PtSi focal plane arrays

1998 ◽  
Author(s):  
Yi Li ◽  
Xinjian Yi ◽  
Jianhua Hao
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays ◽  
Microlens Arrays ◽  
Diffractive Microlens

Design of diffractive microlens array integration with focal plane arrays

2000 ◽  
Author(s):  
Sihai Chen ◽  
Xinjian Yi ◽  
Yi Li ◽  
Miao He ◽  
Sixiang Chen ◽  
...  
Keyword(s):  
Focal Plane ◽  
Microlens Array ◽  
Focal Plane Arrays ◽  
Diffractive Microlens

Monolithic integration technique for microlens arrays with infrared focal plane arrays

2002 ◽  
Vol 43 (2) ◽  
pp. 109-112 ◽  
Author(s):  
Sihai Chen ◽  
Xinjian Yi ◽  
Linbing Kong ◽  
Miao He ◽  
Hongchen Wang
Keyword(s):  
Focal Plane ◽  
Monolithic Integration ◽  
Focal Plane Arrays ◽  
Integration Technique ◽  
Microlens Arrays ◽  
Infrared Focal Plane Arrays

Semiconductor YBACUO Uncooled Focal Plane Arrays

2006 ◽  
Author(s):  
Donald Butler ◽  
Zeynep Celik-Bulter
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays

Further Developments in Improved Sensitivity, Low-cost Uncooled IR Detector Focal Plane Arrays

2010 ◽  
Author(s):  
Wendy L. Sarney ◽  
John W. Little ◽  
Kimberley A. Olver ◽  
Frank E. Livingston ◽  
Krisztian Niesz ◽  
...  
Keyword(s):  
Focal Plane ◽  
Low Cost ◽  
Focal Plane Arrays ◽  
Ir Detector

Dependence of the Deformation of 128×128 InSb Focal-plane Arrays on the Silicon Readout Integrated Circuit Thickness

2015 ◽  
Vol 9 (1) ◽  
pp. 170-174 ◽  
Author(s):  
Xiaoling Zhang ◽  
Qingduan Meng ◽  
Liwen Zhang
Keyword(s):  
Thermal Shock ◽  
Indium Antimonide ◽  
Integrated Circuit ◽  
Focal Plane ◽  
Three Dimensional ◽  
Fracture Probability ◽  
Focal Plane Arrays ◽  
Thermal Shock Test ◽  
Readout Integrated Circuit ◽  
Three Dimensional Modeling

The square checkerboard buckling deformation appearing in indium antimonide infrared focal-plane arrays (InSb IRFPAs) subjected to the thermal shock tests, results in the fracturing of the InSb chip, which restricts its final yield. In light of the proposed three-dimensional modeling, we proposed the method of thinning a silicon readout integrated circuit (ROIC) to level the uneven top surface of InSb IRFPAs. Simulation results show that when the silicon ROIC is thinned from 300 μm to 20 μm, the maximal displacement in the InSb IRFPAs linearly decreases from 7.115 μm to 0.670 μm in the upward direction, and also decreases linearly from 14.013 μm to 1.612 μm in the downward direction. Once the thickness of the silicon ROIC is less than 50 μm, the square checkerboard buckling deformation distribution presenting in the thicker InSb IRFPAs disappears, and the top surface of the InSb IRFPAs becomes flat. All these findings imply that the thickness of the silicon ROIC determines the degree of deformation in the InSb IRFPAs under a thermal shock test, that the method of thinning a silicon ROIC is suitable for decreasing the fracture probability of the InSb chip, and that this approach improves the reliability of InSb IRFPAs.

scholarly journals Fabrication of 15-$\mu$ m Pitch $640\times512$ InAs/GaSb Type-II Superlattice Focal Plane Arrays

2019 ◽  
Vol 55 (4) ◽  
pp. 1-5 ◽  
Author(s):  
Fikri Oguz ◽  
Yetkin Arslan ◽  
Erkin Ulker ◽  
Alpan Bek ◽  
Ekmel Ozbay
Keyword(s):  
Focal Plane ◽  
Focal Plane Arrays ◽  
Type Ii ◽  
Type Ii Superlattice
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