Dual-hologram shearing interferometry with regulated sensitivity

1998 ◽  
Author(s):  
Gregory R. Toker ◽  
Daniel Levin
Keyword(s):  
Shearing Interferometry

scholarly journals Optical arbitrary waveform characterization via dual-quadrature spectral shearing interferometry

2009 ◽  
Vol 17 (5) ◽  
pp. 3381 ◽  
Author(s):  
Houxun Miao ◽  
Daniel E. Leaird ◽  
Carsten Langrock ◽  
Martin M. Fejer ◽  
Andrew M. Weiner
Keyword(s):  
Shearing Interferometry ◽  
Arbitrary Waveform

Study on Measurement of Thin Film Thickness with Lateral Shearing Interferometry

2013 ◽  
Vol 718-720 ◽  
pp. 848-852
Author(s):  
Jun Hong Su ◽  
Ying Shi ◽  
Jin Man Ge
Keyword(s):  
Film Thickness ◽  
Transform Method ◽  
Shearing Interferometry ◽  
Platform Process ◽  
Fast Fourier Transform Method ◽  
Lateral Shearing ◽  
Phase Unwrap ◽  
Technical Indicator ◽  
Lateral Shearing Interferometry ◽  
Shearing Interference

The film thickness is an important technical indicator of film devices, and its accuracy directly affects various performances of optical components. In fabrication process of film device, fast and accurate measurement of film thickness has positive significance on product quality control. In this paper, measure film thickness with lateral shearing interferometry. Collect interferograms through structured lateral shearing interference platform, process interferogram with Fast Fourier Transform method to extract phase, unwrap the wrapped phase to achieve phase value. Finally, calculate film thickness based on lateral shearing interference principle. The thickness of sample is 119.6800nm measured by this method, basically the same with the result 120.6036nm that measured by ZYGO interferometer. This experiment shows that lateral shearing interferometry not only suit to measurement of film thickness, but also abundant high-precision method of measuring film thickness, and has high practical value.

Diffractive simultaneous bidirectional shearing interferometry using tailored spatially coherent light

2011 ◽  
Vol 50 (4) ◽  
pp. 571 ◽  
Author(s):  
Vanusch Nercissian ◽  
Irina Harder ◽  
Klaus Mantel ◽  
Andreas Berger ◽  
Gerd Leuchs ◽  
...  
Keyword(s):  
Coherent Light ◽  
Shearing Interferometry

scholarly journals Increasing the Consistency and Accuracy of Spectral Shearing Interferometry Via Multiple Shearing

2009 ◽  
Author(s):  
Adam S. Wyatt ◽  
Dane R. Austin ◽  
Tobias Witting ◽  
Ian A. Walmsley ◽  
Alexander Grün ◽  
...  
Keyword(s):  
Shearing Interferometry

scholarly journals Soft tissue elastography via shearing interferometry

2018 ◽  
Vol 5 (04) ◽  
pp. 1 ◽  
Author(s):  
Dominic Buchta ◽  
Hüseyin Serbes ◽  
Daniel Claus ◽  
Giancarlo Pedrini ◽  
Wolfgang Osten
Keyword(s):  
Soft Tissue ◽  
Shearing Interferometry ◽  
Tissue Elastography
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