Formation of high-performance PtSi/p-Si Schottky barrier detector using high-resolution transmission electron microscope

1998 ◽  
Author(s):  
Wen-Sheng Wang ◽  
Chia Ho ◽  
Tien-Ming Chuang
Author(s):  
H. Tochigi ◽  
H. Uchida ◽  
S. Shirai ◽  
K. Akashi ◽  
D. J. Evins ◽  
...  

A New High Excitation Objective Lens (Second-Zone Objective Lens) was discussed at Twenty-Sixth Annual EMSA Meeting. A new commercially available Transmission Electron Microscope incorporating this new lens has been completed.Major advantages of the new instrument allow an extremely small beam to be produced on the specimen plane which minimizes specimen beam damages, reduces contamination and drift.


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