Photoresist focus exposure matrix (FEM) measurements using critical-dimension atomic force microscopy (CD AFM)

1998 ◽  
Author(s):  
A. Meyyappan ◽  
Sylvain Muckenhirn
Keyword(s):  
Atomic Force Microscopy ◽  
Critical Dimension ◽  
Force Microscopy ◽  
Atomic Force

Strategies for nanoscale contour metrology using critical dimension atomic force microscopy

2011 ◽  
Author(s):  
Ndubuisi G. Orji ◽  
Ronald G. Dixson ◽  
András E. Vládar ◽  
Michael T. Postek
Keyword(s):  
Atomic Force Microscopy ◽  
Critical Dimension ◽  
Force Microscopy ◽  
Atomic Force

Large-Scale Fabrication of Carbon Nanotube Probe Tips for Atomic Force Microscopy Critical Dimension Imaging Applications

Nano Letters ◽  
2004 ◽  
Vol 4 (7) ◽  
pp. 1301-1308 ◽  
Author(s):  
Qi Ye ◽  
Alan M. Cassell ◽  
Hongbing Liu ◽  
Kuo-Jen Chao ◽  
Jie Han ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Carbon Nanotube ◽  
Large Scale ◽  
Critical Dimension ◽  
Force Microscopy ◽  
Atomic Force

Atomic force microscopy with carbon nanotube tip for critical dimension measurement

2002 ◽  
Author(s):  
Byong Chon Park ◽  
Ki Y. Jung ◽  
Won Young Song ◽  
Beomhoan O ◽  
TaeBong Eom
Keyword(s):  
Atomic Force Microscopy ◽  
Carbon Nanotube ◽  
Critical Dimension ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dimension Measurement
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