Optical characterization of carbon ion implantation into Si and SiGe alloys
1998 ◽
Vol 285
(3-4)
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pp. 216-220
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1993 ◽
Vol 80-81
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pp. 632-635
2001 ◽
Vol 142-144
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pp. 418-423
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1995 ◽
Vol 106
(1-4)
◽
pp. 452-456
2017 ◽
Vol 28
(10)
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pp. 7115-7120
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2007 ◽
Vol 310
(2)
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pp. 2150-2151
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2002 ◽
Vol 194
(4)
◽
pp. 463-468
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Keyword(s):
2018 ◽
Vol 29
(18)
◽
pp. 15708-15714