Analysis and characterization of In-film defects generated during sputter deposition of aluminum-alloy films

1998 ◽  
Author(s):  
Murali Abburi ◽  
Vikram Pavate ◽  
Sunny Chiang ◽  
Keith Hansen ◽  
Glen Mori ◽  
...  
2018 ◽  
Vol 10 (3-4) ◽  
pp. 175-190 ◽  
Author(s):  
R.R. McCullough ◽  
J.B. Jordon ◽  
P.G. Allison ◽  
D.J. Bammann ◽  
Lyan Garcia ◽  
...  

2002 ◽  
Vol 33 (3) ◽  
pp. 489-498 ◽  
Author(s):  
Beate Heinz ◽  
Birgit Skrotzki
Keyword(s):  

2000 ◽  
Vol 614 ◽  
Author(s):  
H. Geng ◽  
R. Loloee ◽  
J.W. Heckman ◽  
J. Bass ◽  
W.P. Pratt ◽  
...  

ABSTRACTEpitaxial Cu/Py/FeMn and (Cu/Co)×20 GMR magnetic multilayers were grown on single crystal (011) Nb that was deposited on (1121) Al2O3 substrates by dc magnetron sputtering. Electron backscatter patterns (EBSPs) revealed that the Cu films display two twin variants, corresponding to two stacking sequences of {111} planes in fcc. The epitaxial orientation relationship between the bcc Nb and both fcc Cu variants was the Nishiyama-Wasserman (N-W) relationship. Conventional TEM observations revealed epitaxial growth for both the Cu/Py/FeMn and (Cu/Co)×20 multilayers. High-resolution TEM confirmed epitaxial growth of close packed (011) Nb on (1120) Al2O3 substrates with [111]Nb∥[0001]Al2O3. Numerous small twins were observed in the Cu near the Cu-Nb interface of the Cu/Py/FeMn multilayer. In the Cu/Co multilayer, the growth planes of the Cu and Co were found to be {100} instead of the expected close-packed {111} planes of the fcc structure.


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