Fiber optic Fabry-Perot pressure sensor with the Si3N4/SiO2/Si3N4 diaphragm fabricated using micromachining technology
2019 ◽
Vol 37
(11)
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pp. 2719-2725
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2009 ◽
Vol 80
(3)
◽
pp. 033104
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Keyword(s):