Novel near-field optical probe for 100-nm critical dimension measurements
2009 ◽
Vol 42
(7)
◽
pp. 075502
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Keyword(s):
2006 ◽
Keyword(s):
2010 ◽
Vol 19
(04)
◽
pp. 563-569
1999 ◽
Vol 194
(2-3)
◽
pp. 369-373
◽
Keyword(s):