Planar microlens arrays using stumping replication method

1997 ◽  
Author(s):  
Shigeru Aoyama ◽  
Tsukasa Yamashita
Keyword(s):  
Microlens Arrays ◽  
Replication Method ◽  
Planar Microlens

Multiple imaging and multiple Fourier transformation using planar microlens arrays

1990 ◽  
Vol 29 (28) ◽  
pp. 4064 ◽  
Author(s):  
Kenjiro Hamanaka ◽  
Hiroyuki Nemoto ◽  
Masahiro Oikawa ◽  
Eiji Okuda ◽  
Takashi Kishimoto
Keyword(s):  
Fourier Transformation ◽  
Microlens Arrays ◽  
Multiple Imaging ◽  
Planar Microlens

Dynamic display of square-aperture planar microlens arrays

2010 ◽  
Author(s):  
Fengjun Zhang ◽  
Xiaomei Chen ◽  
Zhifang Zhao ◽  
Jie Chen ◽  
Sumei Zhou ◽  
...  
Keyword(s):  
Microlens Arrays ◽  
Dynamic Display ◽  
Planar Microlens

Ultrathin Planar Microlens Arrays Based on Geometric Metasurface

2017 ◽  
Vol 530 (2) ◽  
pp. 1700326 ◽  
Author(s):  
Jinjin Jin ◽  
Xiaohu Zhang ◽  
Ping Gao ◽  
Jun Luo ◽  
Zuojun Zhang ◽  
...  
Keyword(s):  
Microlens Arrays ◽  
Planar Microlens

Replication of Wet Objects and Cells

1974 ◽  
Vol 32 ◽  
pp. 102-103
Author(s):  
S. Basu ◽  
D. F. Parsons
Keyword(s):  
Water Vapor Pressure ◽  
High Vacuum ◽  
Polystyrene Latex ◽  
Vacuum System ◽  
Saturated Water Vapor ◽  
Replication Method ◽  
New Methods ◽  
Saturated Water ◽  
Water Vapors ◽  
Intermediate Chamber

We are approaching the invasiveness of cancer cells from the studies of their wet surface morphology which should distinguish them from their normal counterparts. In this report attempts have been made to provide physical basis and background work to a wet replication method with a differentially pumped hydration chamber (Fig. 1) (1,2), to apply this knowledge for obtaining replica of some specimens of known features (e.g. polystyrene latex) and finally to realize more specific problems and to improvize new methods and instrumentation for their rectification. In principle, the evaporant molecules penetrate through a pair of apertures (250, 350μ), through water vapors and is, then, deposited on the specimen. An intermediate chamber between the apertures is pumped independently of the high vacuum system. The size of the apertures is sufficiently small so that full saturated water vapor pressure is maintained near the specimen.

scholarly journals UV Nanoimprint Lithography: Geometrical Impact on Filling Properties of Nanoscale Patterns

Nanomaterials ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 822
Author(s):  
Christine Thanner ◽  
Martin Eibelhuber
Keyword(s):  
Layer Thickness ◽  
Process Parameters ◽  
Nanoimprint Lithography ◽  
Failure Modes ◽  
Production Method ◽  
Efficient Production ◽  
Comprehensive Overview ◽  
Replication Method ◽  
Wide Range ◽  
Pattern Size

Ultraviolet (UV) Nanoimprint Lithography (NIL) is a replication method that is well known for its capability to address a wide range of pattern sizes and shapes. It has proven to be an efficient production method for patterning resist layers with features ranging from a few hundred micrometers and down to the nanometer range. Best results can be achieved if the fundamental behavior of the imprint resist and the pattern filling are considered by the equipment and process parameters. In particular, the material properties and pattern size and shape play a crucial role. For capillary force-driven filling behavior it is important to understand the influencing parameters and respective failure modes in order to optimize the processes for reliable full wafer manufacturing. In this work, the nanoimprint results obtained for different pattern geometries are compared with respect to pattern quality and residual layer thickness: The comprehensive overview of the relevant process parameters is helpful for setting up NIL processes for different nanostructures with minimum layer thickness.

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