High-power 24-channel radial array slab rf-excited carbon dioxide laser

1997 ◽  
Author(s):  
Walter D. Bilida ◽  
James D. Strohschein ◽  
Herb J. J. Seguin
Keyword(s):  
Carbon Dioxide ◽  
High Power ◽  
Carbon Dioxide Laser

Carbon-dioxide laser with high power per unit length

1969 ◽  
Vol 5 (4) ◽  
pp. 63 ◽  
Author(s):  
A. Crocker ◽  
M.S. Wills
Keyword(s):  
Carbon Dioxide ◽  
High Power ◽  
Carbon Dioxide Laser ◽  
Unit Length

Development of the reliable high power pulsed carbon dioxide laser system for LPP EUV light source

2012 ◽  
Author(s):  
Takeshi Ohta ◽  
Krzysztof M. Nowak ◽  
Takashi Suganuma ◽  
Hidenobu Kameda ◽  
Masato Moriya ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Light Source ◽  
High Power ◽  
Carbon Dioxide Laser ◽  
Laser System
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