scholarly journals Large-area surface-discharge UV light source for materials processing applications

1997 ◽  
Author(s):  
Robert C. Sze
Keyword(s):  
Light Source ◽  
Uv Light ◽  
Materials Processing ◽  
Surface Discharge ◽  
Large Area

Accessible, large-area, uniform dose photolithography using a moving light source

2021 ◽  
Author(s):  
Alexander Kaltashov ◽  
Prabu Karthick Parameshwar ◽  
Nicholas Lin ◽  
Christopher Moraes
Keyword(s):  
Light Source ◽  
Uv Light ◽  
Movement Pattern ◽  
Exposure Dose ◽  
Light Sources ◽  
Large Area ◽  
Domain Specific ◽  
Conventional Photolithography ◽  
Uv Lamp ◽  
Uv Dose

Abstract Photolithography is an essential microfabrication process in which ultraviolet (UV) light is projected through a mask to selectively expose and pattern a light-sensitive photoresist. Conventional photolithography devices are based on a stationary UV lamp and require carefully-designed optics to ensure that a uniform exposure dose is provided across the substrate being patterned. Access to such systems is typically limited to certain labs with domain-specific expertise and sufficient resources. The emergence of LED-based UV technologies has provided improved access to the necessary light sources, but issues with uniformity and limited exposure sizes still remain. In this work, we explore the use of a moving light source (MOLIS) for large-area lithography applications, in which the light source path speed, elevation, and movement pattern can be used to smooth out any spatial variations in source light intensity profiles, and deliver a defined and uniform cumulative UV exposure dose to a photoresist-coated substrate. By repurposing a 3D printer and UV-LED flashlight, we constructed an inexpensive MOLIS platform, simulated and verified the parameters needed to produce a uniform UV dose exposure, and demonstrate this approach for SU-8 microfabrication of features with dimensions relevant to many areas in biomedical engineering. The ready accessibility and inexpensive nature of this approach may be of considerable value to small laboratories interested in occasional and low-throughput prototype microfabrication applications.

A low-cost low-maintenance ultraviolet lithography light source based on light-emitting diodes

Lab on a Chip ◽  
2015 ◽  
Vol 15 (1) ◽  
pp. 57-61 ◽  
Author(s):  
M. Erickstad ◽  
E. Gutierrez ◽  
A. Groisman
Keyword(s):  
Light Source ◽  
Light Emitting Diodes ◽  
Uv Light ◽  
Low Cost ◽  
Uniform Illumination ◽  
Large Area ◽  
Ultraviolet Lithography ◽  
Light Emitting

An LED-based UV-light source producing collimated uniform illumination over a large area is built and used to fabricate PDMS microchannels with near-rectangular profiles and depths up to 300 μm.

Development of a UV Light Source using Pr:LuAG Thin Film Target Pumped by Electron Beam

2015 ◽  
Vol 135 (9) ◽  
pp. 1049-1054
Author(s):  
Norio Ichikawa ◽  
Kohei Ikeda ◽  
Yoshinori Honda ◽  
Hiroyuki Taketomi ◽  
Koji Kawai ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Light Source ◽  
Uv Light

A Large Emitting Area UV Light Source With Semiconductor Cathode

2004 ◽  
Vol 32 (5) ◽  
pp. 2093-2098 ◽  
Author(s):  
B.G. Salamov ◽  
Y. OztekinCiftci ◽  
K. Colakoglu
Keyword(s):  
Light Source ◽  
Uv Light

Mechanical Characterization of UV Photopolymerized PMMA with Different Photo-Initiator Concentration

2021 ◽  
Vol 903 ◽  
pp. 11-16
Author(s):  
M.A. Manjunath ◽  
K. Naveen ◽  
Prakash Vinod ◽  
N. Balashanmugam ◽  
M.R. Shankar
Keyword(s):  
Mechanical Properties ◽  
Light Source ◽  
Polymethyl Methacrylate ◽  
Biomedical Applications ◽  
Mechanical Characterization ◽  
Uv Light ◽  
Curing Time ◽  
Uv Led ◽  
Pmma Resin

Polymethyl methacrylate (PMMA) is one among few known photo-polymeric resin useful in lithography for fabricating structures having better mechanical properties to meet the requirement in electronics and biomedical applications. This study explores the effect of Photo Initiator (PI) concentration and also curing time on strength and hardness of Polymethyl methacrylate (PMMA) obtained by UV photopolymerization of Methyl methacrylate (MMA) monomer. The UV LED light source operating at the wavelength of 364 nm is used with Benzoin Ethyl Ether (BEE) as photo initiator. The curing of PMMA resin is supported with peltier cooling device placed at the bottom of the UV light source. The characterisation study of UV photo cured PMMA is analysed through nano indenter (Agilent Technologies-G200). The current work investigates the influence of PI concentration and curing time in achieving maximum mechanical properties for UV photopolymerized PMMA.

Improved miniature long-lived uv light source

1976 ◽  
Vol 15 (12) ◽  
pp. 2968
Author(s):  
S. F. Somerstein
Keyword(s):  
Light Source ◽  
Uv Light

Can hospital computers be disinfected using a hand-held UV light source?

2009 ◽  
Vol 72 (1) ◽  
pp. 92-94 ◽  
Author(s):  
C.P. Sweeney ◽  
S.J. Dancer
Keyword(s):  
Light Source ◽  
Uv Light

scholarly journals Multi-Nozzle Pneumatic Extrusion-Based Additive Manufacturing System for Printing Sensing Pads

Inventions ◽  
2020 ◽  
Vol 5 (3) ◽  
pp. 29
Author(s):  
Kai-Wei Chen ◽  
Ming-Jong Tsai ◽  
Heng-Sheng Lee
Keyword(s):  
Additive Manufacturing ◽  
Light Source ◽  
Manufacturing System ◽  
Uv Light ◽  
Numerical Control ◽  
Double Layers ◽  
Python Language ◽  
G Code ◽  
Curing Light ◽  
Cnc Controller

This paper developed a multi-nozzle pneumatic extrusion-based additive manufacturing (AM) system and applied it to print multi-material polymers and conductive sensing pads. We used pneumatic extrusion nozzles to extrude the liquid material and then cured it by an ultraviolet (UV) light source. The multi-nozzle pneumatic extrusion-based additive manufacturing system mainly integrates both PC-based HMI and CNC controller to operate the three-axis motion and the extrusion flow control. Moreover, the peripheral I/Os include both positive and negative pressure and also the curing light source. A D/A controller is also applied to control the value of the pneumatic pressure. The coding part utilizes the numerical control software along with the PLC planning to operate the AM machine automatically. Our experiment is conducted by using Simplify3D, a commercial 3D printing slicing software. Different requirements were set for extrusion nozzles with different materials, and then we executed the path controlling G-code data by Python Language. Our system successfully prints multi-material polymer structure pads which include the hard and soft material pad fabricated in double-layers, triple-layers and also the grid structure. Finally, we find that the printed pad has conductivity.

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