Optogalvanic indication of gas discharge plasma instability and optical probing of laser-light-perturbed hollow cathode discharge

Author(s):  
Dimo Zhechev ◽  
Svetla Atanassova
2005 ◽  
Vol 48 (3) ◽  
pp. 328-332 ◽  
Author(s):  
P. M. Schanin ◽  
N. N. Koval ◽  
Yu. Kh. Akhmadeev

Author(s):  
А.И. Меньшаков ◽  
Д.Р. Емлин

A method for TiN-coatings deposition by anodic evaporation of titanium in a high-current gas discharge (30 A) with a self–heated hollow cathode in an Ar+N2 medium is proposed. Optical spectral analysis shows that a large amount of activated titanium is present in the gas-discharge plasma, and the proportion of metal ions coming from the plasma to the substrate, taking into account the single-charge ions, reaches 70%. At a nitrogen flow of 5 sccm, TiN-coatings with a thickness of 2 µm and a hardness of up to 24 GPa were obtained. The deposition rate at a distance of 7 cm from the vapor source was ~4 µm/h.


1997 ◽  
Vol 7 (5) ◽  
pp. 1039-1044
Author(s):  
N. N. Lebedeva ◽  
V. I. Orbukh ◽  
B. G. Salamov ◽  
M. Özer ◽  
K. Çolakoǧlu ◽  
...  

1979 ◽  
Vol 40 (C7) ◽  
pp. C7-873-C7-874
Author(s):  
Yu. I. Filenko ◽  
B. M. Stepanov ◽  
L. S. Ushakov

1996 ◽  
Vol 166 (11) ◽  
pp. 1197 ◽  
Author(s):  
Aleksandr V. Eletskii ◽  
Boris M. Smirnov

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