Step structure characterization using a metrological AFM rig based on nano measuring machine
1978 ◽
Vol 48
◽
pp. 515-521
Keyword(s):
1993 ◽
Vol 51
◽
pp. 1136-1137
1987 ◽
Vol 48
(C5)
◽
pp. C5-101-C5-104
◽
2016 ◽
Vol 31
(2)
◽
pp. 219-224
◽