Correction of wavelength error of white-light interference phase-shifting algorithm

2021 ◽  
Author(s):  
yuqin Wang ◽  
Rongzhu zhang
Keyword(s):  
White Light ◽  
Phase Shifting ◽  
Light Interference ◽  
White Light Interference ◽  
Interference Phase

Study on Phase Shifting Algorithm and System of White Light Interference

2014 ◽  
Vol 889-890 ◽  
pp. 749-754
Author(s):  
Lin Juan Deng ◽  
Yu Xia Fu ◽  
Xiao Yu Cai ◽  
Yuan Li ◽  
Li Hua Lei ◽  
...  
Keyword(s):  
White Light ◽  
Phase Shifting ◽  
Light Phase ◽  
Traceability System ◽  
Light Interference ◽  
Measurement Results ◽  
Accuracy Of Measurement ◽  
White Light Interference ◽  
Phase Shifting Method ◽  
Definition Of

The white-light interferometry (WLI) has been widely used in 3D topography measurement. This paper introduces a white light phase shifting method for interferometry with the combination of Hariharan phase shifting and WLI. A micro/nanolevel mechanic system was designed and built for the experiments. To verify system accuracy and feasibility, a 100nm step height standard was measured by the designed system and the metrological nanomeasurement machine (NMM). Results of 102.7nm and 102.5nm are obtained respectively. En value of 0.14 is calculated, demonstrating the reliability of result measured by the system. Based on classic nanoquantity traceability system, the measurement results can effectively traced back to the definition of nanometer magnitude, which can improve the accuracy of measurement.

Error Analysis of a Fiber Optic Accelerometer Based on White Light Interference

2016 ◽  
Vol 45 (6) ◽  
pp. 606004
Author(s):  
WANG Ming-chao ◽  
WANG Xue-feng ◽  
WANG Zhao ◽  
TANG Cai-jieHUANG Jian-ye
Keyword(s):  
Error Analysis ◽  
White Light ◽  
Fiber Optic ◽  
Light Interference ◽  
White Light Interference

Fast white light interference signal processing method based on effective signal extraction

2019 ◽  
Vol 48 (10) ◽  
pp. 1013002
Author(s):  
马 龙 Ma Long ◽  
贾 竣 Jia Jun ◽  
裴 昕 Pei Xin ◽  
胡艳敏 Hu Yanmin ◽  
周 航 Zhou Hang ◽  
...  
Keyword(s):  
Signal Processing ◽  
White Light ◽  
Processing Method ◽  
Signal Extraction ◽  
Interference Signal ◽  
Light Interference ◽  
Signal Processing Method ◽  
White Light Interference ◽  
Effective Signal
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