High-brightness LDP source for EUVL mask inspection

2021 ◽  
Author(s):  
Kazuya Aoki ◽  
Yoshihiko Sato ◽  
Yusuke Teramoto ◽  
Takahiro Shirai ◽  
Shunichi Morimoto ◽  
...  
Keyword(s):  
High Brightness ◽  
Mask Inspection

A Compact High-Brightness Accelerator-based EUV Source for Actinic Mask Inspection

2018 ◽  
Author(s):  
Terence Garvey ◽  
Yasin Ekinci ◽  
Leonid Rivkin ◽  
Andreas Streun ◽  
Albin Wrulich
Keyword(s):  
High Brightness ◽  
Mask Inspection

High brightness electrodeless Z-Pinch EUV source for mask inspection tools

2012 ◽  
Author(s):  
Stephen F. Horne ◽  
Matthew J. Partlow ◽  
Deborah S. Gustafson ◽  
Matthew M. Besen ◽  
Donald K. Smith ◽  
...  
Keyword(s):  
High Brightness ◽  
Mask Inspection ◽  
Z Pinch

High-brightness LDP EUV source for EUV mask inspection

2021 ◽  
Author(s):  
Noritaka Ashizawa ◽  
Yoshihiko Sato ◽  
Hidenori Watanabe ◽  
Yusuke Teramoto ◽  
Takahiro Shirai ◽  
...  
Keyword(s):  
High Brightness ◽  
Mask Inspection

A Stable Field Emission Electron Source

1977 ◽  
Vol 35 ◽  
pp. 58-59
Author(s):  
W.R. Bottoms ◽  
G.B. Haydon
Keyword(s):  
Field Emission ◽  
Signal To Noise Ratio ◽  
High Brightness ◽  
Electron Sources ◽  
Brightness Field ◽  
Current Densities ◽  
Properties Of Materials ◽  
Stable Field ◽  
Stable Current ◽  
Careful Design

There is great interest in improving the brightness of electron sources and therefore the ability of electron optical instrumentation to probe the properties of materials. Extensive work by Dr. Crew and others has provided extremely high brightness sources for certain kinds of analytical problems but which pose serious difficulties in other problems. These sources cannot survive in conventional system vacuums. If one wishes to gather information from the other signal channels activated by electron beam bombardment it is necessary to provide sufficient current to allow an acceptable signal-to-noise ratio. It is possible through careful design to provide a high brightness field emission source which has the capability of providing high currents as well as high current densities to a specimen. In this paper we describe an electrode to provide long-lived stable current in field emission sources.The source geometry was based upon the results of extensive computer modeling. The design attempted to maximize the total current available at a specimen.

Optical Properties of HVEM Accelerators

1975 ◽  
Vol 33 ◽  
pp. 180-181
Author(s):  
A. Strojnik ◽  
J.W. Scholl ◽  
V. Bevc
Keyword(s):  
Optical Properties ◽  
Electron Accelerator ◽  
Systematic Investigation ◽  
Electron Source ◽  
High Brightness ◽  
The Past ◽  
Wide Range ◽  
Optical Behavior

The electron accelerator, as inserted between the electron source (injector) and the imaging column of the HVEM, is usually a strong lens and should be optimized in order to ensure high brightness over a wide range of accelerating voltages and illuminating conditions. This is especially true in the case of the STEM where the brightness directly determines the highest resolution attainable. In the past, the optical behavior of accelerators was usually determined for a particular configuration. During the development of the accelerator for the Arizona 1 MEV STEM, systematic investigation was made of the major optical properties for a variety of electrode configurations, number of stages N, accelerating voltages, 1 and 10 MEV, and a range of injection voltages ϕ0 = 1, 3, 10, 30, 100, 300 kV).

Characteristics and Application of Temperature-Field Emitters

1975 ◽  
Vol 33 ◽  
pp. 144-145
Author(s):  
N. Tamura ◽  
T. Goto ◽  
Y. Harada
Keyword(s):  
Temperature Field ◽  
Electron Microscope ◽  
Field Emission ◽  
Resolving Power ◽  
High Brightness ◽  
Field Emitters ◽  
Emission Electron ◽  
Sufficient Stability ◽  
Scanning Electron ◽  
Illuminating System

On account of its high brightness, the field emission electron source has the advantage that it provides the conventional electron microscope with highly coherent illuminating system and that it directly improves the, resolving power of the scanning electron microscope. The present authors have reported some results obtained with a 100 kV field emission electron microscope.It has been proven, furthermore, that the tungsten emitter as a temperature field emission source can be utilized with a sufficient stability under a modest vacuum of 10-8 ~ 10-9 Torr. The present paper is concerned with an extension of our study on the characteristics of the temperature field emitters.

A comparative study on the cold type and thermal type field emission guns used in the same electron microscope

1978 ◽  
Vol 36 (1) ◽  
pp. 58-59
Author(s):  
M. Iwatsuki ◽  
Y. Kokubo ◽  
Y. Harada
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Signal To Noise Ratio ◽  
Electron Source ◽  
Resolving Power ◽  
Optical Source ◽  
Experimental Conditions ◽  
High Brightness ◽  
Illumination System ◽  
Transmission Electron

On accout of its high brightness, small optical source size, and minimal energy spread, the field emission gun (FEG) has the advantage that it provides the conventional transmission electron microscope (TEM) with a highly coherent illumination system and directly improves the resolving power and signal-to-noise ratio of the scanning electron microscope (SEM). The FEG is generally classified into two types; the cold field emission (C-FEG) and thermal field emission gun (T-FEG). The former, in which a field emitter is used at the room temperature, was successfully developed as an electron source for the SEM. The latter, in which the emitter is heated to the temperature range of 1000-1800°K, was also proved to be very suited as an electron source for the TEM, as well as for the SEM. Some characteristics of the two types of the FEG have been studied and reported by many authors. However, the results of the respective types have been obtained separately under different experimental conditions.

Performance and applications of a field-emission gun TEM/STEM

1992 ◽  
Vol 50 (2) ◽  
pp. 942-943
Author(s):  
Judith M. Brock ◽  
Max T. Otten ◽  
Marc. J.C. de Jong
Keyword(s):  
Field Emission ◽  
High Resolution Imaging ◽  
High Quality ◽  
Small Energy ◽  
High Brightness ◽  
Small Probe ◽  
Resolution Imaging ◽  
Convergent Beam ◽  
Beam Patterns ◽  
Beam Diffraction

A Field Emission Gun (FEG) on a TEM/STEM instrument provides a major improvement in performance relative to one equipped with a LaB6 emitter. The improvement is particularly notable for small-probe techniques: EDX and EELS microanalysis, convergent beam diffraction and scanning. The high brightness of the FEG (108 to 109 A/cm2srad), compared with that of LaB6 (∼106), makes it possible to achieve high probe currents (∼1 nA) in probes of about 1 nm, whilst the currents for similar probes with LaB6 are about 100 to 500x lower. Accordingly the small, high-intensity FEG probes make it possible, e.g., to analyse precipitates and monolayer amounts of segregation on grain boundaries in metals or ceramics (Fig. 1); obtain high-quality convergent beam patterns from heavily dislocated materials; reliably detect 1 nm immuno-gold labels in biological specimens; and perform EDX mapping at nm-scale resolution even in difficult specimens like biological tissue.The high brightness and small energy spread of the FEG also bring an advantage in high-resolution imaging by significantly improving both spatial and temporal coherence.

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