High-NA EUV imaging: from system introduction towards low-k1 extension

2021 ◽  
Author(s):  
Eelco van Setten ◽  
Jan van Schoot ◽  
Anton van Oosten ◽  
Claire van Lare ◽  
Friso Wittebrood ◽  
...  
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2010 ◽  
Vol 723 (2) ◽  
pp. 1180-1187 ◽  
Author(s):  
J. T. Schmelz ◽  
S. H. Saar ◽  
K. Nasraoui ◽  
V. L. Kashyap ◽  
M. A. Weber ◽  
...  

2007 ◽  
Vol 59 (sp3) ◽  
pp. S865-S869 ◽  
Author(s):  
Charles M. Brown ◽  
Hirohisa Hara ◽  
Suguru Kamio ◽  
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Gerardo Bottiglieri ◽  
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2009 ◽  
Vol 699 (2) ◽  
pp. 968-975 ◽  
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