Direct patterning of TiO2 and TiN based sol-gel using laser interference and nanospheres UV lithography
2008 ◽
Vol 48
(12)
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pp. 2367-2372
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2011 ◽
Vol 357
(3)
◽
pp. 1223-1227
◽
2012 ◽
Vol 10
(4)
◽
pp. 667-673
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Keyword(s):
Keyword(s):