Eco-friendly 3D micromachining of polymers by 172 nm photoablation for optical and microfluidics applications

UV and Higher Energy Photonics: From Materials to Applications 2021 ◽

10.1117/12.2594868 ◽

2021 ◽

Author(s):

Andrey E. Mironov ◽

Sehyun Park ◽

Thomas Reboli ◽

Jinhong Kim ◽

Dane J. Sievers ◽

...

Download Full-text