Spatially coherent and incoherent realistic wave optical modelling of the chromatic confocal signal for error minimised investigation of rough and inclined surfaces
1994 ◽
Vol 52
◽
pp. 992-993
Keyword(s):
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2004 ◽
Vol 8
(3)
◽
pp. 427-432
◽
2007 ◽
Vol 85
◽
pp. 012027
◽
Keyword(s):