Uncertainty evaluation of a 300-mm-aperture vertical Fizeau interferometer

Author(s):  
Yuntao Wang ◽  
Lei Chen ◽  
Chenhui Hu ◽  
Donghui Zheng ◽  
Chen Huang ◽  
...  
2018 ◽  
Vol 8 (12) ◽  
pp. 2539 ◽  
Author(s):  
Xin Xiong ◽  
Yuki Shimizu ◽  
Xiuguo Chen ◽  
Hiraku Matsukuma ◽  
Wei Gao

Form errors of a planar scale grating, such as pitch deviations and out-of-flatness, are major contributors to the final measurement uncertainty of an interferential scanning-type planar encoder. Following the previous work, in which a method has been proposed to evaluate both the out-of-flatness and the pitch deviations of a planar scale grating by a Fizeau interferometer in Littrow configuration, uncertainty analysis on this method is performed in this paper. Theoretical equations are derived to make quantitative uncertainty analysis while taking possible error factors into account. To overcome the drawbacks of a traditional uncertainty matrix approach, a new procedure is proposed to evaluate the uncertainty in the PV (peak-to-valley) deviation of a surface form, so as to assure the quality of measurement. Experiments are finally conducted to demonstrate the feasibility of proposed uncertainty evaluation method.


Vacuum ◽  
2021 ◽  
pp. 110034
Author(s):  
Yoshinori Takei ◽  
Hajime Yoshida ◽  
Eiichi Komatsu ◽  
Kenta Arai

2021 ◽  
Vol 1826 (1) ◽  
pp. 012103
Author(s):  
Pedro Oliveira Costa Machado Neto ◽  
Paulo Cesar Ramalho Brandão ◽  
Juan Carlos Mateus Sanchez ◽  
Lúnia Coelho de Almeida de Lima ◽  
Carlos Eduardo Cardoso Galhardo

2021 ◽  
Vol 768 (1) ◽  
pp. 012008
Author(s):  
Zhen Yang ◽  
Husheng Zhang ◽  
Qiang Wang ◽  
Cuicui Li ◽  
Wenlong Xu ◽  
...  

2021 ◽  
pp. 125482
Author(s):  
Lars Hildebrandt ◽  
Tristan Zimmermann ◽  
Sebastian Primpke ◽  
Dieter Fischer ◽  
Gunnar Gerdts ◽  
...  

1998 ◽  
Vol 11 (1) ◽  
pp. 583-583
Author(s):  
S. Röser ◽  
U. Bastian ◽  
K.S. de Boer ◽  
E. Høg ◽  
E. Schilbach ◽  
...  

DIVA (Double Interferometer for Visual Astrometry) is a Fizeau interferometer on a small satellite. It will perform astrometric and photometric observations of at least 4 million stars. A launch in 2002 and a minimum mission length of 24 months are aimed at. A detailed description of the experiment can be obtained from the DIVA homepage at http://www.aip.de:8080/᷉dso/diva. An overview is given by Röser et al., 1997. The limiting magnitude of DIVA is about V = 15 for spectral types earlier than M0, but drops to about V = 17.5 for stars later than M5. Table 1 gives a short overview on DIVA’s performance. DIVA will carry out a skysurvey complete to V = 12.5. For the first time this survey will comprise precise photometry in at least 8 bands in the wavelength range from 400 to 1000 nm. DIVA will improve parallaxes by a factor of 3 compared to Hipparcos; proper motions by at least a factor of 2 and, in combination with the Hipparcos observations, by a factor of 10 for Hipparcos stars. At least 30 times asmany stars as Hipparcos will be observed, and doing this DIVA will fill the gap in observations between Hipparcos and GAIA. DIVA’s combined astrometric and photometric measurements of high precision will have important impacts on astronomy and astrophysics in the next decade.


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