Multi-beam mask writer in EUV era: challenges and opportunities

Author(s):  
Bassam Shamoun ◽  
Mahesh Chandramouli ◽  
Bin Liu ◽  
Reid Juday ◽  
Igal Bucay ◽  
...  
2021 ◽  
Author(s):  
Wu Lan ◽  
Yuan Peng Du ◽  
Songlan Sun ◽  
Jean Behaghel de Bueren ◽  
Florent Héroguel ◽  
...  

We performed a steady state high-yielding depolymerization of soluble acetal-stabilized lignin in flow, which offered a window into challenges and opportunities that will be faced when continuously processing this feedstock.


2008 ◽  
Author(s):  
Sarah L. Hastings ◽  
Tracy J. Cohn ◽  
E. Janie Pinterits

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