Full chip computational lithography for KrF multi-focal imaging (MFI) (Conference Presentation)

Optical Microlithography XXXIV ◽

10.1117/12.2585651 ◽

2021 ◽

Author(s):

Will Conley ◽

Vince Plachecki ◽

Stephen Hsu ◽

Michael Crouse ◽

Rongkuo Zhao ◽

...

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