Statistical analysis of the impact of 2D reticle variability on wafer variability in advanced EUV nodes using large-scale Monte Carlo simulations
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2009 ◽
Vol 332
(1)
◽
pp. 26-34
◽
Keyword(s):
2018 ◽
Vol 62
(1)
◽
pp. 1301-1305
2014 ◽
Vol 52
(10)
◽
pp. 6459-6470
◽
Keyword(s):