CNT pellicles: Imaging results of the first full-field EUV exposures

2021 ◽  
Author(s):  
Joost Bekaert ◽  
Emily Gallagher ◽  
Rik Jonckheere ◽  
Lieve Van Look ◽  
Remko Aubert ◽  
...  
Keyword(s):  
Full Field ◽  
Imaging Results

Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures

2021 ◽  
Vol 20 (02) ◽  
Author(s):  
Joost Bekaert ◽  
Emily Gallagher ◽  
Rik Jonckheere ◽  
Lieve Van Look ◽  
Remko Aubert ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Extreme Ultraviolet ◽  
Full Field ◽  
Imaging Results

scholarly journals Nanoimaging using soft X-ray and EUV laser-plasma sources

2018 ◽  
Vol 167 ◽  
pp. 03001 ◽  
Author(s):  
Przemyslaw Wachulak ◽  
Alfio Torrisi ◽  
Mesfin Ayele ◽  
Andrzej Bartnik ◽  
Joanna Czwartos ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Material Science ◽  
Imaging Systems ◽  
Fibroblast Cells ◽  
Plasma Sources ◽  
Full Field ◽  
X Ray ◽  
Water Window ◽  
Imaging Results ◽  
New Research

In this work we present three experimental, compact desk-top imaging systems: SXR and EUV full field microscopes and the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources based on a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths are capable of imaging nanostructures with a sub-50 nm spatial resolution and short (seconds) exposure times. The SXR contact microscope operates in the “water-window” spectral range and produces an imprint of the internal structure of the imaged sample in a thin layer of SXR sensitive photoresist. Applications of such desk-top EUV and SXR microscopes, mostly for biological samples (CT26 fibroblast cells and Keratinocytes) are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The development of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.

Optical design and laboratory test of an internal pushbroom hyperspectral microscopy

2019 ◽  
Vol 33 (12) ◽  
pp. 1950143 ◽  
Author(s):  
Zhoufeng Zhang ◽  
Bingliang Hu ◽  
Qinye Yin ◽  
Tao Yu ◽  
Zhaohui Zhang
Keyword(s):  
Optical Design ◽  
Disease Diagnosis ◽  
Medical Applications ◽  
Modulation Transfer ◽  
Compact Structure ◽  
Full Spectrum ◽  
Full Field ◽  
Spectral Signatures ◽  
Imaging Results ◽  
Spectral Channels

Hyperspectral imaging is an emerging technology for various medical applications, especially in disease diagnosis of early and biomedical research based on their unique spectral signatures. A hyperspectral microscopy based on a prism-grating-prism is designed for various medical applications. The spectral range between 400 nm to 800 nm is sampled by 256 spectral channels, the modulation transfer function (MTF) values of full spectrum and full field of view are close to the diffraction limit, the smile is less than 6.4% of a pixel, and the keystone is less than 1.6% of a pixel. At the same time, the hyperspectral microscopy used an internal pushbroom technology, which has the advantages of compact structure and good portability. The spectral imaging results demonstrate the great potential of this internal pushbroom hyperspectral microscopy for the pathologists to automatically detect tumor tissue in pathological slides and early disease diagnosis.

scholarly journals Biological Applications of Short Wavelength Microscopy Based on Compact, Laser-Produced Gas-Puff Plasma Source

2020 ◽  
Vol 10 (23) ◽  
pp. 8338
Author(s):  
Alfio Torrisi ◽  
Przemysław W. Wachulak ◽  
Andrzej Bartnik ◽  
Łukasz Węgrzyński ◽  
Tomasz Fok ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Short Exposure ◽  
Biological Applications ◽  
Short Exposure Time ◽  
Full Field ◽  
X Ray ◽  
Water Window ◽  
Imaging Results

Over the last decades, remarkable efforts have been made to improve the resolution in photon-based microscopes. The employment of compact sources based on table-top laser-produced soft X-ray (SXR) in the “water window” spectral range (λ = 2.3–4.4 nm) and extreme ultraviolet (EUV) plasma allowed to overcome the limitations imposed by large facilities, such as synchrotrons and X-ray free electron lasers (XFEL), because of their high complexity, costs, and limited user access. A laser-plasma double stream gas-puff target source represents a powerful tool for microscopy operating in transmission mode, significantly improving the spatial resolution into the nanometric scale, comparing to the traditional visible light (optical) microscopes. Such an approach allows generating the plasma efficiently, without debris, providing a high flux of EUV and SXR photons. In this review, we present the development and optimization of desktop imaging systems: a EUV and an SXR full field microscope, allowing to achieve a sub-50 nm spatial resolution with short exposure time and an SXR contact microscope, capable to resolve internal structures in a thin layer of sensitive photoresist. Details about the source, as well as imaging results for biological applications, will be presented and discussed.

Full-Field Approach for Modeling of Microstructural Evolutions During Forming Processes

2019 ◽  
Author(s):  
S. Andrietti ◽  
M. Bernacki ◽  
N. Bozzolo ◽  
L. Maire ◽  
P. De Micheli ◽  
...  
Keyword(s):  
Full Field ◽  
Field Approach
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