On product overlay characterization after stressed layer etch

2021 ◽  
Author(s):  
Richard van Haren ◽  
Orion Mouraille ◽  
Oktay Yildirim ◽  
Leon van Dijk ◽  
Kaushik Kumar ◽  
...  
Keyword(s):  
Stressed Layer

Electromechanical Behavior in Micromachined Piezoelectric Membranes

2003 ◽  
Vol 782 ◽  
Author(s):  
M. C. Robinson ◽  
J. C. Raupp ◽  
I. Demir ◽  
C. D. Richards ◽  
R. F. Richards ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Piezoelectric Materials ◽  
Electrical Energy ◽  
Lead Zirconate ◽  
Nanoscale Systems ◽  
Design And Optimization ◽  
Electromechanical Behavior ◽  
Stressed Layer ◽  
Thickness Variations ◽  
Electrode Coverage

ABSTRACTPiezoelectric materials can convert mechanical and electrical energy, a particularly useful tool in developing micro and nanoscale systems. Characterizing the electromechanical behavior is essential to the design and optimization of the material's and device's performance. This paper examines the influence of boundary (clamping) conditions, relative thickness variations between the active one to two micron thick piezoelectric membrane and underlying passive support structure, and the electrode coverage on the electromechanical behavior. Membranes were fabricated with silicon and lead zirconate titanate (PZT) with a ratio of Zr to Ti of 40:60 that provide thickness ratios between 1:2 and 2:1 by depositing the PZT using sequential solution deposition. PZT films contain a tensile stress that accumulates during processing, therefore a compressive stressed layer of tungsten was sputtered on bulk micromachined membranes to produce a near zero net residual stress. A nonlinear finite element numerical simulation technique is utilized for the analysis of the composite thin film. A comparison between the behavioral trends determined by simulation and experimental methods will be discussed.

scholarly journals Determination of Stresses in Incrementally Deposited Films From Wafer-Curvature Measurements

2020 ◽  
Vol 87 (10) ◽  
Author(s):  
Zhaoxia Rao ◽  
Hanxun Jin ◽  
Alison Engwall ◽  
Eric Chason ◽  
Kyung-Suk Kim
Keyword(s):  
Residual Stress ◽  
Finite Thickness ◽  
Deposition Process ◽  
Wafer Curvature ◽  
Curvature Measurement ◽  
Stressed Layer ◽  
Relaxation Stress ◽  
Curvature Measurements ◽  
Deposited Films

Abstract We report closed-form formulas to calculate the incremental-deposition stress, the elastic relaxation stress, and the residual stress in a finite-thickness film from a wafer-curvature measurement. The calculation shows how the incremental deposition of a new stressed layer to the film affects the amount of the film/wafer curvature and the stress state of the previously deposited layers. The formulas allow the incremental-deposition stress and the elastic relaxation to be correctly calculated from the slope of the measured curvature versus thickness for arbitrary thicknesses and biaxial moduli of the film and the substrate. Subtraction of the cumulative elastic relaxation from the incremental-deposition stress history results in the residual stress left in the film after the whole deposition process. The validities of the formulas are confirmed by curvature measurements of electrodeposited Ni films on substrates with different thicknesses.

scholarly journals Finite-amplitude shear horizontal waves propagating in a pre-stressed layer between two half-spaces

2013 ◽  
Vol 50 (22-23) ◽  
pp. 3586-3596 ◽  
Author(s):  
Priza Kayestha ◽  
Elizabete Rodrigues Ferreira ◽  
Anil C. Wijeyewickrema
Keyword(s):  
Finite Amplitude ◽  
Stressed Layer ◽  
Shear Horizontal

scholarly journals  On Classification of the Earth's Crust Areas by the Level of Geodynamic Threat

2020 ◽  
Author(s):  
Andrian Batugin
Keyword(s):  
Anthropogenic Impact ◽  
Anthropogenic Impacts ◽  
Earth’S Crust ◽  
Induced Earthquakes ◽  
Mining Operations ◽  
Tectonic Faults ◽  
Stressed Layer ◽  
Earth's Crust ◽  
Anthropogenic Intervention

Abstract It is accepted as a well-known fact that a similar anthropogenic impact on the Earth's crust in different places causes dissimilar response. Seismic zoning maps are not designed to predict such geodynamic hazards as rock bursts, induced earthquakes, reactivation of tectonic faults, etc., and require careful adjustment in places of intense impact on the subsurface strata. In this regard, we consider the classification of the Earth's crust areas according to the degree of geodynamic hazard, i.e. its potential geodynamic response to anthropogenic intervention. This classification is based on the concept that there exists a critically stressed layer within the Earth’s crust. It is believed that such critically stressed layer within the Earth’s crust extends from the Earth's surface to a certain depth, which at each point depends on the nature of the interaction between crustal blocks of different hierarchical levels.From this perspective, anthropogenic impact, such as mining operations, represents a direct impact upon the critically stressed zone. The hypothesis is accepted that the thicker is the critical stressed rock layer, the stronger might be the response to anthropogenic intervention, as it has more accumulated energy. Four categorized of the geodynamic threat were found and mapped. To verify this classification, the manifestations of the geodynamic hazards were studied. The intensity of geodynamic hazard increases from the 1st area to the 4th area. The phenomenon of large induced seismic events with hypocenters at great depths is explained by the base of this idea and could be associated with anthropogenic impacts from the surface directly on the regional zone of the critical stressed rock massif. The approach can be used to assess the geodynamic consequences of human exposure to the Earth's crust.

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