High-speed wafer film measurement with heterogeneous optical sensor system

Author(s):  
Doo-Hyun Cho ◽  
Seung Beom Park ◽  
Sung-Ha Kim ◽  
Taejoong Kim ◽  
Kwangsung Lee
2015 ◽  
Vol 64-65 ◽  
pp. 337-346 ◽  
Author(s):  
Mathias Neumann ◽  
Florian Dreier ◽  
Philipp Günther ◽  
Ulrich Wilke ◽  
Andreas Fischer ◽  
...  

2011 ◽  
Vol 25 (1) ◽  
pp. 319-330 ◽  
Author(s):  
P. Günther ◽  
F. Dreier ◽  
T. Pfister ◽  
J. Czarske ◽  
T. Haupt ◽  
...  

1994 ◽  
Author(s):  
Masaaki Mokuno ◽  
Isao Kawano ◽  
Hiroshi Horiguchi ◽  
Koichi Kibe
Keyword(s):  

2010 ◽  
Vol 7 ◽  
pp. 109-117
Author(s):  
O.V. Darintsev ◽  
A.B. Migranov ◽  
B.S. Yudintsev

The article deals with the development of a high-speed sensor system for a mobile robot, used in conjunction with an intelligent method of planning trajectories in conditions of high dynamism of the working space.


2015 ◽  
Author(s):  
S. Rota-Rodrigo ◽  
R. Pérez-Herrera ◽  
A. Lopez-Aldaba ◽  
M. C. López Bautista ◽  
O. Esteban ◽  
...  

2019 ◽  
Author(s):  
L. Chen ◽  
U. Cikalova ◽  
B. Bendjus ◽  
S. Muench ◽  
M. Roellig

2005 ◽  
Vol 297-300 ◽  
pp. 2022-2027 ◽  
Author(s):  
Jin Yi Lee ◽  
Ji Seoung Hwang ◽  
Tetsuo Shoji ◽  
Jae Kyoo Lim

The magneto-optical nondestructive inspection system (hereafter refer to as RMO system) using magneto-optical sensor (hereafter refer to as MO sensor) offers the benefits of providing image data and LMF information at the same time. Therefore this system makes it possible to carry out remote and high speed inspection of cracks from the intensity of the reflected light and to estimate the shape of a crack more effectively than by already existing methods. In other words, the shape of crack could be evaluated using image data, and crack depth can be determined by calculating the intensity of reflected light. The purposes of this study were to confirm the vertical components of leakage magnetic flux from a crack using RMO system and to verify the effects of MO sensor using the finite element method and dipole model calculation. The effectiveness of these analysis methods was compared with experiments using a RMO system and several types and sizes of the crack on plate specimens. The volume of a crack could be estimated using the optical intensity regardless of the shape of cracks.


2021 ◽  
pp. 1-1
Author(s):  
Sergey Sinitsa ◽  
Nir Sochen ◽  
David Mendelovich ◽  
Mikhail Borisover ◽  
Beni Lew ◽  
...  

2020 ◽  
Vol 168 ◽  
pp. 111276
Author(s):  
Long Li ◽  
Yankun Peng ◽  
Yongyu Li ◽  
Cheng Yang ◽  
Kuanglin Chao

Sign in / Sign up

Export Citation Format

Share Document