Optimizing focus and dose process windows for robust process control using a multi-feature analysis

2021 ◽  
Author(s):  
Philip Groeger ◽  
Ranjan Khurana ◽  
Aayush Mitra ◽  
Mycahya Eggleston ◽  
Stefan Buhl ◽  
...  
Keyword(s):  
Process Control ◽  
Feature Analysis ◽  
Robust Process

Robust Process Control at Cerestar's Refineries

1999 ◽  
Vol 29 (1) ◽  
pp. 30-48 ◽  
Author(s):  
Kumar Rajaram ◽  
R. Jaikumar ◽  
Franz Behlau ◽  
Frans van Esch ◽  
Corrie Heynen ◽  
...  
Keyword(s):  
Process Control ◽  
Robust Process

scholarly journals Examination of a repetitive process control system

2019 ◽  
Vol 287 ◽  
pp. 08002
Author(s):  
Nina G. Nikolova
Keyword(s):  
Control System ◽  
Process Control ◽  
Control Systems ◽  
Process Control System ◽  
Robust Performance ◽  
Repetitive Process ◽  
Process Control Systems ◽  
Improved Performance ◽  
Robust Process

In the present work, the application of repetitive filters in the robust process control systems is examined. The functionality of the proposed system and the improved performance, robust performance and filtering properties has been proven.

Robust process control.

1990 ◽  
Vol 45 (4) ◽  
pp. 1149
Author(s):  
G.S. Virk
Keyword(s):  
Process Control ◽  
Robust Process

Improved R[sub s] Monitoring for Robust Process Control of High Energy Well Implants

2008 ◽  
Author(s):  
J. H. Kim ◽  
S. Kim ◽  
G. J. Ra ◽  
K. W. Lee ◽  
R. N. Reece ◽  
...  
Keyword(s):  
Process Control ◽  
High Energy ◽  
Robust Process
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