A design and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures
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2019 ◽
pp. 1612-1617
Keyword(s):
2021 ◽
Vol 67
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pp. 102043
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2020 ◽
Vol 12
(2)
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pp. 168781402090385
2014 ◽
Vol 563
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pp. 342-346
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2014 ◽
Vol 1
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pp. 365-368