Nano-scale effects of selective spin-on deposition
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2019 ◽
Vol 4
(1)
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pp. 131-138
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2017 ◽
Vol 23
(5)
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pp. 715-726
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2018 ◽
Vol 40
(4)
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2011 ◽
Vol 20
(08)
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pp. 1659-1675
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2010 ◽
Vol 214
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pp. 012049
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