Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators

2021 ◽  
Author(s):  
Christoph K. Hohle ◽  
Sebastian Döring ◽  
Martin Friedrichs ◽  
Andreas Gehner ◽  
Dirk Rudloff ◽  
...  
Keyword(s):  
Spatial Light Modulators ◽  
Light Modulators

Giant Anisotropy of Conductivity in Hydrogenated Nanocrystalline Silicon Thin Films

1998 ◽  
Vol 536 ◽  
Author(s):  
A. B. Pevtsov ◽  
N. A. Feoktistov ◽  
V. G. Golubev
Keyword(s):  
Thin Films ◽  
Film Thickness ◽  
Percolation Theory ◽  
Nanocrystalline Silicon ◽  
Spatial Light Modulators ◽  
Light Emitting ◽  
Light Modulators ◽  
Silicon Thin Films ◽  
Longitudinal Conductivity ◽  
Transverse Conductivity

AbstractThin (<1000 Å) hydrogenated nanocrystalline silicon films are widely used in solar cells, light emitting diodes, and spatial light modulators. In this work the conductivity of doped and undoped amorphous-nanocrystalline silicon thin films is studied as a function of film thickness: a giant anisotropy of conductivity is established. The longitudinal conductivity decreases dramatically (by a factor of 109 − 1010) as the layer thickness is reduced from 1500 Å to 200 Å, while the transverse conductivity remains close to that of a doped a- Si:H. The data obtained are interpreted in terms of the percolation theory.

scholarly journals Ag-Yb Alloy-Novel Tunable Plasmonic Material

Photonics ◽  
2021 ◽  
Vol 8 (7) ◽  
pp. 288
Author(s):  
Suetying Ching ◽  
Chakming Chan ◽  
Jack Ng ◽  
Kokwai Cheah
Keyword(s):  
Beam Steering ◽  
Volume Ratio ◽  
Response Strength ◽  
Transmission Efficiency ◽  
Spatial Light Modulators ◽  
Alloy Thin Film ◽  
Ellipsometric Measurement ◽  
Plasmonic Material ◽  
Light Modulators ◽  
Surface Plasmon Coupling

Metals are commonly used in plasmonic devices because of their strong plasmonic property. However, such properties are not easily tuned. For applications such as spatial light modulators and beam steering, tunable plasmonic properties are essential, and neither metals nor other plasmonic materials possess truly tunable plasmonic properties. In this work, we show that the silver alloy silver–ytterbium (Ag-Yb) possesses tunable plasmonic properties; its plasmonic response strength can be adjusted as a function of Yb concentration. Such tunability can be explained in terms of the influence of Yb on bound charge and interaction of its dielectric with the dielectric of Ag. The change in transition characteristics progressively weakens Ag’s plasmonic properties. With a spectral ellipsometric measurement, it was shown that the Ag-Yb alloy thin film retains the properties of Ag with high transmission efficiency. The weakened surface plasmon coupling strength without dramatic change in the coupling wavelengths implies that the tunability of the Ag-Yb alloy is related to its volume ratio. The principle mechanism of the plasmonic change is theoretically explained using a model. This work points to a potential new type of tunable plasmonic material.

scholarly journals Holographic Display System to Suppress Speckle Noise Based on Beam Shaping

Photonics ◽  
2021 ◽  
Vol 8 (6) ◽  
pp. 204
Author(s):  
Di Wang ◽  
Yi-Wei Zheng ◽  
Nan-Nan Li ◽  
Qiong-Hua Wang
Keyword(s):  
Optical Element ◽  
Speckle Noise ◽  
Beam Shaping ◽  
Diffractive Optical Element ◽  
The Other ◽  
Spatial Light Modulators ◽  
Viewing Angle ◽  
Display System ◽  
Holographic Display ◽  
Light Modulators

In this paper, a holographic system to suppress the speckle noise is proposed. Two spatial light modulators (SLMs) are used in the system, one of which is used for beam shaping, and the other is used for reproducing the image. By calculating the effective viewing angle of the reconstructed image, the effective hologram and the effective region of the SLM are calculated accordingly. Then, the size of the diffractive optical element (DOE) is calculated accordingly. The dynamic DOEs and effective hologram are loaded on the effective regions of the two SLMs, respectively, while the wasted areas of the two SLMs are performed with zero-padded operations. When the laser passes through the first SLM, the light can be modulated by the effective DOEs. When the modulated beam illuminates the second SLM which is loaded with the effective hologram, the image is reconstructed with better quality and lower speckle noise. Moreover, the calculation time of the hologram is reduced. Experiments indicate the validity of the proposed system.

scholarly journals Diffraction Efficiency Characteristics for MEMS-Based Phase-Only Spatial Light Modulator with Nonlinear Phase Distribution

Photonics ◽  
2021 ◽  
Vol 8 (3) ◽  
pp. 62
Author(s):  
Remington S. Ketchum ◽  
Pierre-Alexandre Blanche
Keyword(s):  
Diffraction Efficiency ◽  
High Speed ◽  
Phase Distribution ◽  
Complex Structure ◽  
Spatial Light Modulators ◽  
Light Modulator ◽  
Micro Electro Mechanical Systems ◽  
Light Modulators ◽  
Nonlinear Phase ◽  
Liquid Crystal On Silicon

Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the potential to overcome the limited speed of liquid crystal on silicon (LCoS) spatial light modulators (SLMs) and operate at speeds faster than 10 kHz. This expands the practicality of PLMs to several applications, including communications, sensing, and high-speed displays. The complex structure and fabrication requirements for large, 2D MEMS arrays with vertical actuation have kept MEMS-based PLMs out of the market in favor of LCoS SLMs. Recently, Texas Instruments has adapted its existing DMD technology for fabricating MEMS-based PLMs. Here, we characterize the diffraction efficiency for one of these PLMs and examine the effect of a nonlinear distribution of addressable phase states across a range of wavelengths and illumination angles.

scholarly journals Phase-only transmissive spatial light modulator based on tunable dielectric metasurface

Science ◽  
2019 ◽  
Vol 364 (6445) ◽  
pp. 1087-1090 ◽  
Author(s):  
Shi-Qiang Li ◽  
Xuewu Xu ◽  
Rasna Maruthiyodan Veetil ◽  
Vytautas Valuckas ◽  
Ramón Paniagua-Domínguez ◽  
...  
Keyword(s):  
High Resolution ◽  
Spatial Light Modulator ◽  
Deflection Angle ◽  
Beam Steering ◽  
Beam Deflection ◽  
Spatial Light Modulators ◽  
Light Modulator ◽  
Steering Angle ◽  
Holographic Display ◽  
Light Modulators

Rapidly developing augmented reality, solid-state light detection and ranging (LIDAR), and holographic display technologies require spatial light modulators (SLMs) with high resolution and viewing angle to satisfy increasing customer demands. Performance of currently available SLMs is limited by their large pixel sizes on the order of several micrometers. Here, we propose a concept of tunable dielectric metasurfaces modulated by liquid crystal, which can provide abrupt phase change, thus enabling pixel-size miniaturization. We present a metasurface-based transmissive SLM, configured to generate active beam steering with >35% efficiency and a large beam deflection angle of 11°. The high resolution and steering angle obtained provide opportunities to develop the next generation of LIDAR and display technologies.

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