Effect of surface temperature on GeSbTe damage formation during plasma processing

Author(s):  
Luxherta Buzi ◽  
John Papalia ◽  
Hiroyuki Miyazoe ◽  
Huai-Yu Cheng ◽  
Marinus Hopstaken ◽  
...  
1987 ◽  
Vol 181 (3) ◽  
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Author(s):  
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T.E. Felter ◽  
R.H. Stulen

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Vol 298 ◽  
pp. 57-64
Author(s):  
Chaitanya Krishna Prasad Vallabh ◽  
James D. Stephens ◽  
Grazyna Kmiecik-Lawrynowicz ◽  
Santokh Badesha ◽  
Cetin Cetinkaya

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