Beam stability of buried-heterostructure quantum cascade lasers formed by ICP-etching and HVPE regrowth

2021 ◽  
Author(s):  
Jae Ha Ryu ◽  
Jeremy D. Kirch ◽  
Benjamin Knipfer ◽  
Zerui Liu ◽  
Morgan Turville-Heitz ◽  
...  
Keyword(s):  
Quantum Cascade Lasers ◽  
Quantum Cascade ◽  
Icp Etching ◽  
Beam Stability ◽  
Buried Heterostructure ◽  
Cascade Lasers

scholarly journals Beam Stability of Buried-Heterostructure Quantum Cascade Lasers Employing HVPE Regrowth

2021 ◽  
Author(s):  
Jae Ha Ryu ◽  
Jeremy Kirch ◽  
Benjamin Knipfer ◽  
Zerui Liu ◽  
Morgan Turville-Heitz ◽  
...  
Keyword(s):  
Quantum Cascade Lasers ◽  
Quantum Cascade ◽  
Beam Stability ◽  
Buried Heterostructure ◽  
Cascade Lasers

Processing of deeply etched GaAs/AlGaAs quantum cascade lasers with grating structures

2004 ◽  
Vol 829 ◽  
Author(s):  
S. Golka ◽  
M. Austerer ◽  
C. Pflügl ◽  
W. Schrenk ◽  
G. Strasser
Keyword(s):  
Coupling Coefficient ◽  
Inductively Coupled Plasma ◽  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Mid Infrared ◽  
Quantum Cascade ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Grating Coupling ◽  
Cascade Lasers

ABSTRACTGratings in GaAs/AlGaAs mid-infrared quantum cascade lasers (QCLs) are fabricated with a structure depth of more than 10 μm. A N2/SiCl4 inductively coupled plasma reactive ion etching (ICP-RIE) process was employed to achieve extremely smooth sidewalls and selectivities to the SiNX etch mask of up to 70:1. EDX spectra measured on as-etched samples show that sidewall etch inhibition is caused by a thin Si containing layer on the sidewalls that is formed simultaneously with ICP etching of GaAs at the bottom of the trenches. To demonstrate device application gratings with a pitch of 1.72 μm are applied to long rib waveguide -based QCLs emitting at λ = 10.7 μm. When etched laterally together with the rib the grating gives rise to stable single mode emission up to 295K from these QCLs. The respective grating coupling coefficient is determined to be κ = 29 cm-1.

Buried‐heterostructure mid‐infrared quantum cascade lasers fabricated by non‐selective regrowth and chemical polishing

2015 ◽  
Vol 51 (14) ◽  
pp. 1098-1100
Author(s):  
C.‐C. Chang ◽  
J.D. Kirch ◽  
P. Buelow ◽  
C. Boyle ◽  
T.F. Kuech ◽  
...  
Keyword(s):  
Quantum Cascade Lasers ◽  
Chemical Polishing ◽  
Mid Infrared ◽  
Quantum Cascade ◽  
Buried Heterostructure ◽  
Cascade Lasers

Buried heterostructure quantum cascade lasers with a large optical cavity waveguide

2000 ◽  
Vol 12 (11) ◽  
pp. 1450-1452 ◽  
Author(s):  
M. Beck ◽  
J. Faist ◽  
U. Oesterle ◽  
M. Ilegems ◽  
E. Gini ◽  
...  
Keyword(s):  
Quantum Cascade Lasers ◽  
Optical Cavity ◽  
Quantum Cascade ◽  
Buried Heterostructure ◽  
Cascade Lasers
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