Measurement of interactive matrix and flat-surface calibration of OKO 109-channel deformable mirror using ZYGO-GPI interferometer

2020 ◽  
Author(s):  
Xinyang Chen ◽  
Chaoyan Wang ◽  
Lixin Zheng ◽  
Jianqing Cai ◽  
Yuanyuan Ding
Keyword(s):  
Flat Surface ◽  
Deformable Mirror

Scanned tip measurement of deep vertical facets on a flat surface: Measuring roughness on gaas laser waveguide mirrors

1993 ◽  
Vol 51 ◽  
pp. 532-533
Author(s):  
Chang Shen ◽  
Phil Fraundorf ◽  
Robert W. Harrick
Keyword(s):  
Integrated Circuits ◽  
Flat Surface ◽  
Scanning Force Microscopy ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
Force Microscopy ◽  
Optoelectronic Integrated Circuits ◽  
Laser Waveguide ◽  
Scanning Force ◽  
Gaas Laser

Monolithic integration of optoelectronic integrated circuits (OEIC) requires high quantity etched laser facets which prevent the developing of more-highly-integrated OEIC's. The causes of facet roughness are not well understood, and improvement of facet quality is hampered by the difficulty in measuring the surface roughness. There are several approaches to examining facet roughness qualitatively, such as scanning force microscopy (SFM), scanning tunneling microscopy (STM) and scanning electron microscopy (SEM). The challenge here is to allow more straightforward monitoring of deep vertical etched facets, without the need to cleave out test samples. In this presentation, we show air based STM and SFM images of vertical dry-etched laser facets, and discuss the image acquisition and roughness measurement processes. Our technique does not require precision cleaving. We use a traditional tip instead of the T shape tip used elsewhere to preventing “shower curtain” profiling of the sidewall. We tilt the sample about 30 to 50 degrees to avoid the curtain effect.

Calculation of many-beam dynamic electron diffraction without high-energy approximation

1996 ◽  
Vol 54 ◽  
pp. 128-129
Author(s):  
B. R. Ahn ◽  
N. J. Kim
Keyword(s):  
Electron Diffraction ◽  
Flat Surface ◽  
Dynamic Theory ◽  
High Energy ◽  
Perfect Crystal ◽  
Zone Axis ◽  
Beam Dynamic ◽  
Diffraction Angle ◽  
Energy Approximation ◽  
The Many

High energy approximation in dynamic theory of electron diffraction involves some intrinsic problems. First, the loss of theoretical strictness makes it difficult to comprehend the phenomena of electron diffraction. Secondly, it is difficult to believe that the approximation is reasonable especially in the following cases: 1) when accelerating voltage is not sufficiently high, 2) when the specimen is thick, 3) when the angle between the surface normal of the specimen and zone axis is large, and 4) when diffracted beam with large diffraction angle is included in the calculation. However, until now the method to calculate the many beam dynamic electron diffraction without the high energy approximation has not been proposed. For this reason, the authors propose a method to eliminate the high energy approximation in the calculation of many beam dynamic electron diffraction. In this method, a perfect crystal with flat surface was assumed. The method was applied to the calculation of [111] zone axis CBED patterns of Si.

Large-aperture deformable mirror correction of tiled-grating wavefront error

2006 ◽  
Vol 133 ◽  
pp. 645-648 ◽  
Author(s):  
B. E. Kruschwitz ◽  
R. Jungquist ◽  
J. Qiao ◽  
S. Abbey ◽  
S. E. Dean ◽  
...  
Keyword(s):  
Deformable Mirror ◽  
Large Aperture ◽  
Wavefront Error

Truck Tire Operating Temperatures on Flat and Curved Test Surfaces

2005 ◽  
Vol 33 (3) ◽  
pp. 156-178 ◽  
Author(s):  
T. J. LaClair ◽  
C. Zarak
Keyword(s):  
Flat Surface ◽  
Operating Temperature ◽  
Operating Conditions ◽  
Load Pressure ◽  
Truck Tire ◽  
Endurance Testing ◽  
Operating Temperatures ◽  
The Impact ◽  
Tread Rubber ◽  
Cylindrical Test

Abstract Operating temperature is critical to the endurance life of a tire. Fundamental differences between operations of a tire on a flat surface, as experienced in normal highway use, and on a cylindrical test drum may result in a substantially higher tire temperature in the latter case. Nonetheless, cylindrical road wheels are widely used in the industry for tire endurance testing. This paper discusses the important effects of surface curvature on truck tire endurance testing and highlights the impact that curvature has on tire operating temperature. Temperature measurements made during testing on flat and curved surfaces under a range of load, pressure and speed conditions are presented. New tires and re-treaded tires of the same casing construction were evaluated to determine the effect that the tread rubber and pattern have on operating temperatures on the flat and curved test surfaces. The results of this study are used to suggest conditions on a road wheel that provide highway-equivalent operating conditions for truck tire endurance testing.

Study and manufacture of a novel micro-deformable mirror

2003 ◽  
Author(s):  
Hongbin Yu ◽  
Haiqing Chen ◽  
Zimin Zhu ◽  
Chao Wang ◽  
Dacheng Zhang ◽  
...  
Keyword(s):  
Deformable Mirror

Correcting for Spherical Aberrations in Solid Immersion Microscopy Using a Deformable Mirror

2011 ◽  
Author(s):  
Y. Lu ◽  
E. Ramsay ◽  
C. Stockbridge ◽  
F. H. Koklu ◽  
A. Yurt ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Error Correction ◽  
Deformable Mirror ◽  
Wafer Thickness ◽  
Wavefront Error ◽  
Substrate Wafer ◽  
Thickness Error

Abstract We present a method for correcting spherical aberrations in solid immersion microscopy through the use of a deformable mirror. Aberrations in solid immersion imaging for failure analysis can be induced through off-axis imaging, errors in lens fabrication or mismatch of design and substrate wafer thickness. RMS wavefront error correction of 30% is demonstrated in the case of substrate wafer thickness error.

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