Simulation and Analysis of heterogeneous intensity modulator based on lithium niobate and silicon nitride

2020 ◽  
Author(s):  
KeXin Li ◽  
Yunxin Wang ◽  
Feng Yang ◽  
Dayong Wang ◽  
Dengcai Yang ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Lithium Niobate ◽  
Intensity Modulator

Mode and Polarization‐Division Multiplexing Based on Silicon Nitride Loaded Lithium Niobate on Insulator Platform

2021 ◽  
pp. 2100529
Author(s):  
Xu Han ◽  
Yongheng Jiang ◽  
Andreas Frigg ◽  
Huifu Xiao ◽  
Pu Zhang ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Lithium Niobate ◽  
Polarization Division Multiplexing

Vertical mode transition in hybrid lithium niobate and silicon nitride-based photonic integrated circuit structures

2018 ◽  
Vol 43 (17) ◽  
pp. 4140 ◽  
Author(s):  
Abu Naim R. Ahmed ◽  
Andrew Mercante ◽  
Shouyuan Shi ◽  
Peng Yao ◽  
Dennis W. Prather
Keyword(s):  
Silicon Nitride ◽  
Lithium Niobate ◽  
Integrated Circuit ◽  
Mode Transition ◽  
Photonic Integrated Circuit ◽  
Vertical Mode

Subvolt electro-optical modulator on thin-film lithium niobate and silicon nitride hybrid platform

2020 ◽  
Vol 45 (5) ◽  
pp. 1112 ◽  
Author(s):  
Abu Naim R. Ahmed ◽  
Sean Nelan ◽  
Shouyuan Shi ◽  
Peng Yao ◽  
Andrew Mercante ◽  
...  
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
Optical Modulator ◽  
Electro Optical Modulator ◽  
Hybrid Platform

Low-loss Thin Film Lithium Niobate Bonded on Silicon Nitride Waveguides

2020 ◽  
Author(s):  
Siddhartha Ghosh ◽  
Siva Yegnanarayanan ◽  
Matthew Ricci ◽  
Dave Kharas ◽  
Paul Juodawlkis
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
Low Loss

TE/TM-pass polarizers based on lateral leakage in a thin film lithium niobate–silicon nitride hybrid platform

2020 ◽  
Vol 45 (17) ◽  
pp. 4915 ◽  
Author(s):  
Yang Liu ◽  
Xingrui Huang ◽  
Zezheng Li ◽  
Yingxin Kuang ◽  
Huan Guan ◽  
...  
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
Hybrid Platform

Tunable hybrid silicon nitride and thin-film lithium niobate electro-optic microresonator

2019 ◽  
Vol 44 (3) ◽  
pp. 618 ◽  
Author(s):  
Abu Naim R. Ahmed ◽  
Shouyuan Shi ◽  
Mathew Zablocki ◽  
Peng Yao ◽  
Dennis W. Prather
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Lithium Niobate ◽  
Electro Optic ◽  
Hybrid Silicon

scholarly journals An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 235
Author(s):  
Jianhao Zhang ◽  
Rongbo Wu ◽  
Min Wang ◽  
Youting Liang ◽  
Junxia Zhou ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Lithium Niobate ◽  
Focused Ion Beam ◽  
Ring Resonator ◽  
Ion Beam ◽  
Fused Silica ◽  
Microring Resonator ◽  
Cladding Layer ◽  
Light Coupling ◽  
Integrated Device

We demonstrate the hybrid integration of a lithium niobate microring resonator with a silicon nitride waveguide in the vertical configuration to achieve efficient light coupling. The microring resonator is fabricated on a lithium niobate on insulator (LNOI) substrate using photolithography assisted chemo-mechanical etching (PLACE). A fused silica cladding layer is deposited on the LNOI ring resonator. The silicon nitride waveguide is further produced on the fused silica cladding layer by first fabricating a trench in the fused silica while using focused ion beam (FIB) etching for facilitating the evanescent coupling, followed by the formation of the silicon nitride waveguide on the bottom of the trench. The FIB etching ensures the required high positioning accuracy between the waveguide and ring resonator. We achieve Q-factors as high as 1.4 × 107 with the vertically integrated device.

scholarly journals Heterogeneous integration of lithium niobate and silicon nitride waveguides for wafer-scale photonic integrated circuits on silicon

2017 ◽  
Vol 42 (4) ◽  
pp. 803 ◽  
Author(s):  
Lin Chang ◽  
Martin H. P. Pfeiffer ◽  
Nicolas Volet ◽  
Michael Zervas ◽  
Jon D. Peters ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Lithium Niobate ◽  
Integrated Circuits ◽  
Photonic Integrated Circuits ◽  
Heterogeneous Integration ◽  
Wafer Scale

scholarly journals Single-step etched grating couplers for silicon nitride loaded lithium niobate on insulator platform

APL Photonics ◽  
2021 ◽  
Vol 6 (8) ◽  
pp. 086108
Author(s):  
Xu Han ◽  
Yongheng Jiang ◽  
Andreas Frigg ◽  
Huifu Xiao ◽  
Pu Zhang ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Lithium Niobate ◽  
Single Step ◽  
Grating Couplers
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