Thermal deformation of EUV mask according to mask type and pattern density

2020 ◽  
Author(s):  
Chung-Hyun Ban ◽  
In-Hwa Kang ◽  
Beom-Jun Jeon ◽  
Wonyoung Choi ◽  
Hye-Keun Oh
Keyword(s):  
Thermal Deformation ◽  
Pattern Density ◽  
Mask Type

Experimental study of thermal deformation of honeycombed PCM cooled mirror in resonator

2002 ◽  
Vol 12 (4) ◽  
pp. 271-280 ◽  
Author(s):  
Feng Sun ◽  
Wenfeng Yu ◽  
Zuhai Cheng ◽  
Yaoning Zhang
Keyword(s):  
Experimental Study ◽  
Thermal Deformation

Enabling Artistic Control Over Pattern Density and Stroke Strength

2020 ◽  
pp. 1-1
Author(s):  
John Jethro Virtusio ◽  
Daniel Stanley Tan ◽  
Wen-Huang Cheng ◽  
M. Tanveer ◽  
Kai-Lung Hua
Keyword(s):  
Pattern Density

scholarly journals Modeling and Measurement of Thermal Effect in a Flashlamp-Pumped Direct-Liquid-Cooled Split-Disk Nd:LuAG Ceramic Laser Amplifier

Photonics ◽  
2021 ◽  
Vol 8 (4) ◽  
pp. 97
Author(s):  
Shengzhe Ji ◽  
Wenfa Huang ◽  
Tao Feng ◽  
Long Pan ◽  
Jiangfeng Wang ◽  
...  
Keyword(s):  
Thermal Stress ◽  
Thermal Effects ◽  
Thermal Deformation ◽  
High Energy ◽  
Gain Medium ◽  
Wavefront Aberration ◽  
Experimental Measurements ◽  
Laser Amplifier ◽  
Design And Optimization ◽  
Ceramic Laser

In this paper, a model to predict the thermal effects in a flashlamp-pumped direct-liquid-cooled split-disk Nd:LuAG ceramic laser amplifier has been presented. In addition to pumping distribution, the model calculates thermal-induced wavefront aberration as a function of temperature, thermal stress and thermal deformation in the gain medium. Experimental measurements are carried out to assess the accuracy of the model. We expect that this study will assist in the design and optimization of high-energy lasers operated at repetition rate.

scholarly journals Design and thermal characteristic analysis of motorized spindle cooling system

2021 ◽  
Vol 13 (5) ◽  
pp. 168781402110208
Author(s):  
Yuan Zhang ◽  
Lifeng Wang ◽  
Yaodong Zhang ◽  
Yongde Zhang
Keyword(s):  
Flow Rate ◽  
High Speed ◽  
Thermal Deformation ◽  
Cooling System ◽  
Thermal Characteristic ◽  
Water Flow Rate ◽  
Thermal Characteristics ◽  
Characteristic Analysis ◽  
Motorized Spindle ◽  
Experiment And Simulation

The thermal deformation of high-speed motorized spindle will affect its reliability, so fully considering its thermal characteristics is the premise of optimal design. In order to study the thermal characteristics of high-speed motorized spindles, a coupled model of thermal-flow-structure was established. Through experiment and simulation, the thermal characteristics of spiral cooling motorized spindle are studied, and the U-shaped cooled motorized spindle is designed and optimized. The simulation results show that when the diameter of the cooling channel is 7 mm, the temperature of the spiral cooling system is lower than that of the U-shaped cooling system, but the radial thermal deformation is greater than that of the U-shaped cooling system. As the increase of the channel diameter of U-shaped cooling system, the temperature and radial thermal deformation decrease. When the diameter is 10 mm, the temperature and radial thermal deformation are lower than the spiral cooling system. And as the flow rate increases, the temperature and radial thermal deformation gradually decrease, which provides a basis for a reasonable choice of water flow rate. The maximum error between experiment and simulation is 2°C, and the error is small, which verifies the accuracy and lays the foundation for future research.

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