scholarly journals Image blur investigation using EUV-interference lithography

2020 ◽  
Author(s):  
Timothée Allenet ◽  
Jara G. Santaclara ◽  
Gijsbert Rispens ◽  
Bernd Geh ◽  
Yasin Ekinci
Keyword(s):  
Interference Lithography ◽  
Image Blur

2D periodic structures patterned on 3D surfaces by interference lithography for SERS

2018 ◽  
Vol 461 ◽  
pp. 171-174 ◽  
Author(s):  
Ivana Lettrichova ◽  
Agata Laurencikova ◽  
Dusan Pudis ◽  
Jozef Novak ◽  
Matej Goraus ◽  
...  
Keyword(s):  
Periodic Structures ◽  
Interference Lithography ◽  
3D Surfaces

scholarly journals Optimal polarization modulation for orthogonal two-axis Lloyd’s mirror interference lithography

2017 ◽  
Vol 25 (19) ◽  
pp. 22237 ◽  
Author(s):  
Xiuguo Chen ◽  
Zongwei Ren ◽  
Yuki Shimizu ◽  
Yuan-liu Chen ◽  
Wei Gao
Keyword(s):  
Interference Lithography ◽  
Polarization Modulation

scholarly journals Nanoscale perpendicular magnetic island arrays fabricated by extreme ultraviolet interference lithography

2008 ◽  
Vol 92 (10) ◽  
pp. 102505 ◽  
Author(s):  
F. Luo ◽  
L. J. Heyderman ◽  
H. H. Solak ◽  
T. Thomson ◽  
M. E. Best
Keyword(s):  
Extreme Ultraviolet ◽  
Interference Lithography ◽  
Magnetic Island

Periodic patterning using multi-facet prism based laser interference lithography

Laser Physics ◽  
2009 ◽  
Vol 19 (3) ◽  
pp. 505-510 ◽  
Author(s):  
R. Sidharthan ◽  
F. Chollet ◽  
V. M. Murukeshan
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference

Mask-membrane impact on image blur in SCALPEL

2001 ◽  
Vol 57-58 ◽  
pp. 277-284 ◽  
Author(s):  
Masis Mkrtchyan ◽  
Gregg Gallatin ◽  
Alexander Liddle ◽  
Xeiqing Zhu ◽  
Eric Munro ◽  
...  
Keyword(s):  
Image Blur

Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography

2017 ◽  
Vol 170 ◽  
pp. 49-53 ◽  
Author(s):  
Jun Zhao ◽  
Yanqing Wu ◽  
Chaofan Xue ◽  
Shumin Yang ◽  
Liansheng Wang ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Periodic Structures ◽  
Interference Lithography ◽  
X Ray
Sign in / Sign up

Export Citation Format

Share Document