Optical properties of aluminum oxide-copper dielectric-metal nanocomposite thin films deposited by Sputtering Atomic Layer Augmented Deposition (SALAD)
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W:Al2O3 Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition
2016 ◽
Vol 120
(27)
◽
pp. 14681-14689
◽
2007 ◽
pp. 729-732
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